Faculty Members

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Professor FURUTA Mamoru


Year of birth 1964 Gender Male
Affiliation School of Environmental Science and Engineering
Center for Nanotechnology, Research Institute
Laboratory for Structural Nanochemistry, Research Institute
Job titles
Personal web site

Areas of specialization
Laboratory/research office Advanced Materials and Device Science Laboratory
Our aim is to contribute to the improvement of quality of life through the development of advanced functional devices for information technology. Advanced devices and materials enable that development, as well as the moderation of environmental loading. In addition, device science is an essential tool for the enhancement of material functionality. In this laboratory, we conduct a wide variety of research, ranging from materials development to device science research, on the use of semiconductors as core materials.
Current reseach topics
Educational background 2003: Doctor
1988: Master
Professional background 2012-: 
2011-: 
2005-2010: 
2003-2005: 
1996-2003: 
1988-1996: 
Licenses
Academic societies

Courses  * Courses provided in English are shown with (E) mark

Undergraduate school ▼

Seminar 2
Seminar 3
Graduation Thesis
Functional Electric Devices Engineering
Physics and Material Experiment

Graduate school ▼

Individual Work for Graduate
Seminar 1
Seminar 2
Seminar 3
Seminar 4
Advanced Seminar 1
Advanced Seminar 2

Research activities

Research papers ▼

  1. Authors: WANG Dapeng, JIANG Jingxin, FURUTA Mamoru
    Title: Investigation of Carrier Generation Mechanism in Fluorine-Doped n+-In–Ga–Zn-O for Self-Aligned Thin-Film Transistors
    Journal: IEEE Journal of Display Technology, Vol. 12, No. 3, pp. 258-262, IEEE
    Year: 2016/03/01
  2. Authors: Kahori Kise, Mami Fujii, Satoshi Urakaswa, Haruka Yamazaki, Emi Kawashima, Shigekazu Tomai, Koki Yano, WANG Dapeng, FURUTA Mamoru, Yasuaki Ishikawa, Yukiharu Uraoka
    Title: Self-heating induced instability of oxide thin film transistors under dynamic stress
    Journal: Applied Physics Letters, Vol. 108, p. 023501
    Year: 2016/01
  3. Authors: FURUTA Mamoru, JIANG Jingxin, MAI Phi Hung, Tatsuya Toda, WANG Dapeng, Gengo Tatsuoka
    Title: Suppression of Negative Gate Bias and Illumination Stress Degradation by Fluorine-Passivated In-Ga-Zn-O Thin-Film Transistors
    Journal: ECS Journal of Solid State Science and Technology, Vol. 5, No. 3, pp. Q88-Q91
    Year: 2016/01
  4. Authors: MAI Phi Hung, WANG Dapeng, FURUTA Mamoru
    Title: Origin of the alternative current (AC-) gate bias improving the NBIS stability of IGZO TFTs
    Journal: ECS Solid State Letters, Vol. 4 , No. 12, pp. Q66-Q68, Electrochemical Society
    Year: 2015/12
  5. Authors: MAI Phi Hung, WANG Dapeng, FURUTA Mamoru
    Title: Investigating Effect of Postannealing Time on Positive Bias Stress Stability of In–Ga–Zn–O TFT by Conductance Method
    Journal: IEEE Transaction on Electron Devices, Vol. 62, No. 11, pp. 3697-3702
    Year: 2015/11
  6. Authors: Y. Koga, T. Matsuda, M. Kimura, WANG Dapeng, FURUTA Mamoru, M. Kasami, S. Tomai, K. Yano
    Title: Capacitance Sensor of Frequency Modulation for Integrated Touchpanels Using Amorphous In-Sn-Zn-O Thin-FIlmTransistors
    Journal: IEICE Trabsaction on Electronics, Vol. E98-C, No. 11, pp. 1028-1031
    Year: 2015/11
  7. Authors: G. T. Dang, KAWAHARAMURA, Toshiyuki, FURUTA Mamoru, M. W. Allen
    Title: Mist-CVD Grown Sn-Doped α-Ga2O3 MESFETs
    Journal: IEEE TRANSACTIONS ON ELECTRON DEVICES, Vol. 62, No. 11, pp. 3640-3644
    Year: 2015/11
  8. Authors: G. T. Dang, KAWAHARAMURA, Toshiyuki, FURUTA Mamoru, S. Saxena, M. W. Allen
    Title: Stability of In-Ga-Zn-O metal-semiconductor field-effect-transistors under bias, illumination, and temperature stress
    Journal: Applied Physics Letter, Vol. 107, pp. 143504-1-143504-5
    Year: 2015/10/05
  9. Authors: FURUTA Mamoru, JIANG Jingxin, Gengo Tatsuoka, WANG Dapeng
    Title: (Invited) Doping and Defect Passivation in In-Ga-Zn-O by Fluorine
    Journal: ECS Transaction, Vol. 67, No. (1), pp. 41-49
    Year: 2015/06/14
  10. Authors: JIANG Jingxin, Tatsuya Toda, MAI Phi Hung, WANG,Dapeng, FURUTA, Mamoru
    Title: Highly stable fluorine-passivated In–Ga–Zn–O thin-film transistors under positive gate bias and temperature stress
    Journal: Applied Physics Express, Vol. 7, pp. 114103-01-114103-4
    Year: 2014/11/07
  11. Authors: Tatuya Toda, WANG,Dapeng, JIANG Jingxin, MAI Phi Hung, FURUTA, Mamoru
    Title: Quantitative Analysis of the Effect of Hydrogen Diffusion from Silicon Oxide Etch-Stopper Layer into Amorphous In–Ga–Zn–O on Thin-Film Transistor
    Journal: IEEE Transactions on Electron Devices, Vol. 61, No. 11, pp. 3762-3767
    Year: 2014/11
  12. Authors: FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki, Takayuki Uchida, WANG,Dapeng, SANADA, Masaru
    Title: High-Performance Solution-Processed InGaZnO Thin-Film Transistor Fabricated by Ozone-Assisted Atmospheric Pressure Mist Deposition
    Journal: Journal of Display Technology, Vol. 10, No. 11, pp. 934-938, IEEE
    Year: 2014/10
  13. Authors: JIANG Jingxin, FURUTA, Mamoru, WANG,Dapeng
    Title: Self-Aligned Bottom-Gate In-Ga-Zn-O Thin-Film Transistor With Source/Drain Regions Formed by Direct Deposition of Fluorinated Silicon Nitride
    Journal: IEEE Electron Device Letters, Vol. 35, No. 9, pp. 933-935
    Year: 2014/08
  14. Authors: MAI Phi Hung, WANG,Dapeng, Tatsuya Toda, JIANG Jingxin, FURUTA, Mamoru
    Title: Quantitative Analysis of Hole-Trapping and Defect-Creation in InGaZnO Thin-Film Transistor under Negative-Bias and Illumination-Stress
    Journal: ECS Journal of Solid State Science and Technology, Vol. 3, No. 9, pp. Q3023-Q3026
    Year: 2014/07
  15. Authors: WANG,Dapeng, MAI Phi Hung, JIANG Jingxin, Tatuya Toda, FURUTA, Mamoru
    Title: Suppression of Degradation Induced by Negative Gate Bias and Illumination Stress in Amorphous InGaZnO Thin-Film Transistors by Applying Negative Drain Bias
    Journal: ACS Applied Materials & Interfaces, Vol. 6, No. 8, pp. 5713-5718
    Year: 2014/04/01
  16. Authors: MAI Phi Hung, WANG,Dapeng, JIANG Jingxin, FURUTA, Mamoru
    Title: Negative Bias and Illumination Stress Induced Electron Trapping at Back-Channel Interface of InGaZnO Thin-Film Transistor
    Journal: ECS Solid State Letters, Vol. 3, No. 3, pp. Q13-Q16
    Year: 2014/01/23
  17. Authors: WANG,Dapeng, MAI Phi Hung, JIANG Jingxin, Tatsuya Toda, LI, Chaoyang, FURUTA, Mamoru
    Title: Effect of drain bias on negative gate bias and illumination stress induced degradation in amorphous InGaZnO thin-film transistors
    Journal: Japanese Journal of Applied Physics, Vol. 53, pp. 03CC01-1-03CC01-4
    Year: 2014/01
  18. Authors: KAWAHARAMURA, Toshiyuki, Takayuki Uchida, SANADA, Masaru, FURUTA, Mamoru
    Title: Growth and electrical properties of AlOx grown by mist chemical vapor deposition
    Journal: AIP Advances, Vol. 3, pp. 032135-1-032135-9
    Year: 2013/08
  19. Authors: Satoshi Urakawa, Shigekazu Tomai, Yoshihiro Ueoka, Haruka Yamazaki, Masashi Kasami, Koki Yano, WANG,Dapeng, FURUTA, Mamoru, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka
    Title: Thermal Analysis of amorphous oxide thin-film transistor degradated by combination of joule heating and hot carrier effect
    Journal: Applied Physics Letters, Vol. 102, pp. 053506-1-053506-4
    Year: 2013/02/06
  20. Authors: Tatsuya Toda, KAWAHARAMURA, Toshiyuki, FRUSAWA, Hiroshi, FURUTA, Mamoru
    Title: Thin-Film Transistor Using Dielectrophoretic Assembly of Single-Walled Carbon Nanotubes
    Journal: ECS Transactions, Vol. 50, No. 8, pp. 223-228
    Year: 2012/10/08
  21. Authors: FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki, Tatsuya Toda, WANG,Dapeng
    Title: A-InGaZnO Thin-Film Transistor with Non-Vacuum Processed InGaZnO/AlOx Gate Dielectric Stack
    Journal: ECS Transactions, Vol. 50, No. 8, pp. 95-100
    Year: 2012/10/08
  22. Authors: Shin-ichi Shimakawa, WANG,Dapeng, FURUTA, Mamoru
    Title: Photo Induced Negative Bias Instability of Zinc Oxide Thin-Film Transistors
    Journal: Japanese Journal of Applied Physics, Vol. 51, No. 10, pp. 108003-1-108003-2
    Year: 2012/09/20
  23. Authors: FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki, WANG,Dapeng, Tatsuya Toda, HIRAO, Takashi
    Title: Electrical Properties of the Thin-Film Transistor With an Indium–Gallium–Zinc Oxide Channel and an Aluminium Oxide Gate Dielectric Stack Formed by Solution-Based Atmospheric Pressure Deposition
    Journal: IEEE Electron Device Letters, Vol. 33, No. 6, pp. 851-853, IEEE
    Year: 2012/05/08
  24. Authors: KAWAHARAMURA, Toshiyuki, Tai Jan Dan, FURUTA, Mamoru
    Title: Successful Growth of Conductive Highly Crystalline Sn-Doped a-Ga2O3 Thin Films by Fine-Channel Mist Chemical Vapor Deposition
    Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 040207-1-040207-3, Japan Society of Applied Physics　
    Year: 2012/03/26
  25. Authors: S. Shimakawa, Y. Kamada, KAWAHARAMURA, Toshiyuki, WANG,Dapeng, LI, Chaoyang, S. Fujita, HIRAO, Takashi, FURUTA, Mamoru
    Title: Photo-Leakage Current of Thin-Film Transistors with ZnO Channels Formed at Various Oxygen Partial Pressures under Visible Light Irradiation
    Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 03CB04-1-03CB04-4, Japan Society of Applied Physics　
    Year: 2012/03/21
  26. Authors: T. Nishida, K. Fuse, FURUTA, Mamoru, Y. Ishikawa, Y. Uraoka
    Title: Crystallization Using Biomineralized Nickel Nanodots of Amorphous Silicon Thick Films Deposited by Chemical Vapor Deposition, Sputtering and Electron Beam Evaporation
    Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 03CA01-1-03CA01-5, Japan Society of Applied Physics
    Year: 2012/03/21
  27. Authors: MOMOTA, Sadao, Jango Hangu, Takuya Toyonaga, Hikaru Terauchi, Kazuki Maeda, Jun Taniguchi, HIRAO, Takashi, FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki
    Title: Control of swelling height of Si crystal by irradiating Ar beam
    Journal: Journal of Nanoscience and Nanotechnology, Vol. 12, No. 1, pp. 552-556, American Scientific Publishers
    Year: 2012/01
  28. Authors: T. Sakai, H. Seo, S. Aihara, M. Kubota, N. Egami, WANG,Dapeng, FURUTA, Mamoru
    Title: A 128×96 Pixel, 50 m Pixel Pitch Transparent Readout Circuit using InGaZnO4 Thin Film Transistor Array with Indium-Tin-Oxide Eletrodes for Organic Image Sensor
    Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 010202-1-010202-3
    Year: 2011/12/14
  29. Authors: M. Kimura, FURUTA, Mamoru, Y. Kamada, T. Hiramatsu, T. Matsuda, FURUTA, Hiroshi, LI, Chaoyang, S. Fujita, HIRAO, Takashi
    Title: Extraction of Trap Densities in ZnO Thin-Film Transistors and Dependence on Oxygen Partial Pressure During Sputtering of ZnO Films
    Journal: IEEE Transactions on Electron Devices, Vol. 58, No. 9, pp. 3018-3024, IEEE Electron Devices Society
    Year: 2011/09
  30. Authors: Y. Kamada, S. Fujita, M. Kimura, T. Hiramatsu, T. Matsuda, FURUTA, Mamoru, HIRAO, Takashi
    Title: Effect of Chemical Stoichiometry of Channel Region on Bias Instability in ZnO Thin-film Transistors
    Journal: Applied Physics Letters, Vol. 98, p. 103512
    Year: 2011
  31. Authors: FURUTA, Mamoru, Y. Kamada, T. Hiramatsu, LI, Chaoyang, M. Kimura, S. Fujita, HIRAO, Takashi
    Title: Positive Bias Instability of Bottom-Gate Zinc Oxide Thin-Film Transistors (ZnO TFTs) with a SiOx/SiNx Stacked Gate Insulator
    Journal: Japanese Journal of Applied Physics, Vol. 50, p. 03CB09
    Year: 2011
  32. Authors: T. Hiramatsu, FURUTA, Mamoru, T. Matsuda, LI, Chaoyang, HIRAO, Takashi
    Title: Behavior of Oxygen in Zinc Oxide Films Through Thermal Annealing and Its Effect on Sheet Resistance
    Journal: Applied Surface Science, Vol. 257, p. 5480
    Year: 2011
  33. Authors: M. Kimura, FURUTA, Mamoru, Y. Kamada, T. Hiramatsu, T. Matsuda, FURUTA, Hiroshi, LI, Chaoyang, S. Fujita, HIRAO, Takashi
    Title: Trap Densities in ZnO Thin-Film Transistors with SiOx Gate Insulators by Several Deposition Conditions
    Journal: Electrochemical and Solid-State Letters, Vol. 14, pp. H365-H367
    Year: 2011
  34. Authors: H. Seo, S. Aihara, T. Watabe, H. Ohtake, T. Sakai, M. Kubota, N. Egami, T. Hiramatsu, FURUTA, Mamoru, HIRAO, Takashi
    Title: A 128×96 Pixel Stacked-Type Color Image Sensor: Stack of Individual Blue-, Green-, and Red-Sensitive Organic Photoconductive Films Integrated with a ZnO Thin-Film Transistor Readout Circuit
    Journal: Japanese Journal of Applied Physics, Vol. 50, p. 024103
    Year: 2011
  35. Authors: Y. Kamada, S. Fujita, M. Kimura, T. Hiramatsu, T. Matsuda, FURUTA, Mamoru, HIRAO, Takashi
    Title: Reduction of Photo-Leakage Current in ZnO Thin-Film Transistors with Dual-Gate Structure
    Journal: IEEE Electron Device Letters, Vol. 32, p. 509
    Year: 2011
  36. Authors: M. Furuta, Y. Kamada, M. Kimura, T. Hiramatsu, T. Matsuda, C. Li, H. Furuta, S. Fujita, T. Hirao
    Title: Analysis of Hump Characteristics in Thin-Film Transistors with ZnO Channel Deposited by Sputtering under Various Oxygen Partial Pressures
    Journal: IEEE Electron Device Letters, Vol. 31, pp. 1257-1259, IEEE
    Year: 2010/10/21
  37. Authors: H. Furuta, T. Kawaharamura, M. Furuta, K. Kawabata, T. Hirao, T. Komukai, K. Yoshihara, Y. Shimomoto, T. Oguchi
    Title: Crystal Structure Analysis of Multiwalled Carbon Nanotube Forests by Newly Developed Cross-Sectional XRD Measurement
    Journal: Applied Physics Express, Vol. 3, pp. 105101-1-105101-3, The Japan Society of Applied Physics
    Year: 2010/09/17
  38. Authors: T. Matsuda, M. Furuta, T. Hiramatsu, H. Furuta, C. Li, T. Hirao
    Title: Thermal stability of ZnO thin film prepared by RF-magnetron sputtering evaluated by thermal desorption spectroscopy
    Journal: Applied Surface Science, Vol. 256, No. 21, pp. 6350-6353, Elsevier
    Year: 2010/08/15
  39. Authors: H. Furuta, K. Ishii, K. Okada, M. Furuta, T. Hirao
    Title: Simulation Study of the In-plane Type Triode Carbon Nanotube Emitter
    Journal: Journal of Vacuum Science & Technology B, Vol. 28, No. 4, pp. 878-881, The AVS Science & Technology Society
    Year: 2010/07/30
  40. Authors: H. Furuta, T. Kawaharamura, K. Kawabata, M. Furuta, T. Matsuda, C. Li, T. Hirao
    Title: High-Density Short-Height Directly Grown CNT Patterned Emitter on Glass
    Journal: e-Journal of Surface Science and Nanotechnology, Vol. 8, pp. 336-339, The Surface Science Society of Japan
    Year: 2010/07/13
  41. Authors: T. Hiramatsu, T. Matsuda, H. Furuta, H. Nitta, T. Kawaharamura, C. Li, M. Furuta, T. Hirao
    Title: Effect of Pulsed Substrate Bias on Film Properties of SiO2 Deposited by Inductively Coupled Plasma Deposition
    Journal: Japanese Journal Applied Physics, Vol. 49, pp. 03CA03-1-03CA03-4
    Year: 2010/03/23
  42. Authors: M. Furuta, K. Shimamura, H. Tsubokawa, K. Tokushige, H. Furuta, T. Hirao
    Title: Activation Behavior of Boron Implanted Poly-Si on Glass Substrate
    Journal: Thin Solid Films, Vol. 518, pp. 4477-4481, Elsevier
    Year: 2010/03/01
  43. Authors: M. Kimura, Y. Kamada, S. Fujita, T. Hiramatsu, T. Matsuda, FURUTA, Mamoru, HIRAO, Takashi
    Title: Mechanism Analysis of Photoleakage Current in ZnO Thin-Film Transistors using Device Simulation
    Journal: Applied Physics Letters, Vol. 97, p. 163503
    Year: 2010
  44. Authors: FURUTA, Mamoru, T. Hiramatsu, HIRAO, Takashi
    Title: Enhanced Nucleation of Microcrystalline Silicon Thin-films Deposited by Inductively Coupled Plasma Chemical Vapor Deposition (ICP-CVD) with Low-Frequency Pulse Substrate Bias
    Journal: Japanese Journal of Applied Physics, Vol. 49, p. 050202
    Year: 2010
  45. Authors: FURUTA, Mamoru, LI, Chaoyang, HIRAO, Takashi
    Title: Uniformity and Stability in Zinc Oxide Thin-Film Transistors (ZnO TFTs)
    Journal: Journal of Society for Information Display, Vol. 18/10, p. 773
    Year: 2010
  46. Authors: T. Matsuda, FURUTA, Mamoru, T. Hiramatsu, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Crystallinity and Resistivity of ZnO Thin Films with Indium Implantation and Post Annealing
    Journal: Journal of Vacuum Science and Technology A, Vol. 28, p. 135
    Year: 2010
  47. Authors: Chaoyang Li, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Hiroshi Furuta, Mamoru Furuta, Takahiro Hiramatsu, Takashi Hirao, Yoichiro Nakanishi, Keiji Ichi
    Title: Comparison of structural and photoluminescence properties of ZnO nano-structures influenced by gas ratio and substrate bias during radio frequency sputtering
    Journal: J. Vac. Sci. Technol. B, Vol. 28, No. 2, pp. C2B51-55
    Year: 2010
  48. Authors: Y. Kamada, S. Fujita, T. Hiramatsu, T. Matsuda, H. Nitta, FURUTA, Mamoru, HIRAO, Takashi
    Title: Photo Leakage Current of ZnO TFTs in the Visible Light
    Journal: Japanese Journal of Applied Physics, Vol. 49, p. 03CB03
    Year: 2010
  49. Authors: FURUTA, Mamoru, T. Nakanishi, M. Kimura, T. Hiramatsu, T. Matsuda, KAWAHARAMURA, Toshiyuki, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Effect of Surface Treatment of Gate-insulator on Uniformity in Bottom-gate ZnO Thin-film Transistors
    Journal: Electrochemical and Solid-State Letters, Vol. 13, pp. H101-H104
    Year: 2010
  50. Authors: Y. Kamada, S. Fujita, T. Hiramatsu, T. Matsuda, FURUTA, Mamoru, HIRAO, Takashi
    Title: Analysis of Subthreshold Photo-Leakage Current in ZnO Thin-Film Transistors using Indium-Ion Implantation
    Journal: Solid State Electronics, Vol. 54, p. 1392
    Year: 2010
  51. Authors: S. Aihara, H. Seo, M. Namba, H. Ohtake, M. Kubota, N. Egami, T. Hiramatsu, T. Matsuda, FURUTA, Mamoru, HIRAO, Takashi
    Title: Stacked Image Sensor with Green- and Red-Sensitive Organic Photoconductive Films Applying Zinc-Oxide Thin Film Transistors to a Signal Readout Circuit
    Journal: IEEE Trans. on Electron Devices, Vol. 56, No. 11, pp. 2570-2576
    Year: 2009
  52. Authors: Chaoyang Li, Mamoru Furuta, Tokiyoshi Matsuda, Takahiro Hiramatsu, Hiroshi Furuta, Takashi Hirao
    Title: Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by RF magnetron sputtering
    Journal: Thin Solid Films, Vol. 517, pp. 3265-3268
    Year: 2009
  53. Authors: T. Hiramatsu, FURUTA, Mamoru, FURUTA, Hiroshi, T. Matsuda, LI, Chaoyang, HIRAO, Takashi
    Title: Effect of Substrate Bias on Crystal Structure and Thermal Stability of Sputter-Deposited ZnO Films
    Journal: Journal of Crystal Growth, Vol. 311, pp. 282-285
    Year: 2009
  54. Authors: FURUTA, Mamoru, T. Hiramatsu, T. Matsuda, LI, Chaoyang, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Thermal Stability and Sheet Resistance of Undoped ZnO Films Deposited on Insulators
    Journal: Electrochemical and Solid-State Letters, Vol. 12, pp. K74-K76
    Year: 2009
  55. Authors: Chaoyang Li, Toshiyuki Kawaharamura, Tokiyoshi Matsuda, Hiroshi Furuta, Takahiro Hiramatsu, FURUTA, Mamoru, Takashi Hirao
    Title: Intense green cathodoluminescence from low-temperature-deposited ZnO film with fluted hexagonal cone nanostructures
    Journal: Appl. Phys. Express, Vol. 2, pp. 091601-091603
    Year: 2009
  56. Authors: FURUTA, Mamoru, T. Hiramatsu, T. Matsuda, LI, Chaoyang, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Oxygen Bombardment Effects on Average Crystallite Size of Sputter-Deposited ZnO Films
    Journal: Journal of Non-Crystalline Solids, Vol. 354, pp. 1926-1931
    Year: 2008
  57. Authors: T. Matsuda, FURUTA, Mamoru, T. Hiramatsu, LI, Chaoyang, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Influence of Amorphous Buffer Layers on the Crystallinity of Sputter-Deposited Undoped ZnO Films
    Journal: Journal of Crystal Growth, Vol. 315, pp. 31-35
    Year: 2008
  58. Authors: FURUTA, Mamoru, HIRAO, Takashi, T. Hiramatsu, T. Matsuda, LI, Chaoyang, FURUTA, Hiroshi, H. Hokari, M. Yoshida, H. Ishii, M. Kakegawa
    Title: Bottom-Gate Zinc Oxide Thin-Film Transistors (ZnO TFTs) for AM-LCDs
    Journal: IEEE Trans. on Electron Devices, Vol. 55, No. 11, pp. 3136-3142
    Year: 2008
  59. Authors: T. Hiramatsu, FURUTA, Mamoru, FURUTA, Hiroshi, T. Matsuda, HIRAO, Takashi
    Title: Influence of Thermal Annealing on Microstructure of Zinc Oxide Films Deposited by RF Magnetron Sputtering
    Journal: Japanese Journal of Applied Physics, Vol. 46, pp. 3319-3323
    Year: 2007
  60. Authors: FURUTA, Mamoru, T. Hiramatsu, T. Matsuda, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Effects of Energetic Particle Bombardment on the Microstructure of Zinc Oxide (ZnO) Films Deposited by rf Magnetron Sputtering
    Journal: Japanese Journal of Applied Physics, Vol. 46, pp. 4038-4041
    Year: 2007
  61. Authors: T. Matsuda, FURUTA, Mamoru, T. Hiramatsu, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Sheet Resistance and Crystallinity of Ga- and Al- Implanted Zinc Oxide Thin Films with Post Annealing
    Journal: Journal of Vacuum Science and Technology A, Vol. 25, pp. 706-710
    Year: 2007
  62. Authors: T. Hirao, M. Furuta, H. Furuta, T.Matsuda, T. Hiramatsu, H. Hokari, M. Yoshida, M.Ishii, M.Kakegawa
    Title: Novel top-gate zinc oxide thin-film transistors (ZnO TFTs) for AMLCDs
    Journal: J.of the SID, Vol. 15, pp. 17-22
    Year: 2007
  63. Authors: H. Furuta, M. Furuta, T.Matsuda, T.Hiramatsu, T. Hirao
    Title: SiO2 Insulator Film Synthesized at 100℃ using Tetramethylsilane by Inductively Coupled Plasma-Chemical Vapor Deposition
    Journal: Japanese Journal of Applied Physics, Vol. 46, No. 10, pp. L237-L240, The Japan Society of Applied Physics
    Year: 2007
  64. Authors: Chaoyang Li, Mamoru Furuta, Tokiyoshi Matsuda, Takahiro Hiramatsu, Hiroshi Furuta, Takashi Hirao
    Title: RF power and thermal annealing effect on the properties of zinc oxide films prepared by radio frequency magnetron sputtering
    Journal: Research Letter in Materials Science, Vol. 1155, pp. 26459-26463
    Year: 2007
  65. Authors: T. Komukai, K. Aoki, FURUTA, Hiroshi, FURUTA, Mamoru, K. Oura, HIRAO, Takashi
    Title: Density Control of Carbon Nanotubes Through The Thickness of Fe/Al Multilayer Catalyst
    Journal: Japanese Journal of Applied Physics, Vol. 45, pp. 6043-6045
    Year: 2006
  66. Authors: K. Aoki, T. Yamamoto, H. Furuta, T. Ikuno, S. Honda, M. Furuta, K. Oura, T. Hirao
    Title: Low-Temperature Growth of Carbon Nano-Fiber by Thermal Chemical Vapor Deposition using CuNi Catalyst
    Journal: Japanese Journal of Applied Physics, Vol. 45, No. 5329, pp. 5329-5331, The Japan Society of Applied Physics
    Year: 2006
  67. Authors: T. Komukai, K. Aoki, H. Furuta, M. Furuta, K. Oura, HIRAO, Takashi
    Title: Structural Analysis of High-Density Vertically Aligned Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition with Fe/Al Multilayer Catalyst
    Journal: Japanese Journal of Applied Physics, Vol. 45, No. 11, pp. 8988-8990, The Japan Society of Applied Physics
    Year: 2006
  68. Authors: FURUTA, Mamoru, Y. Uraoka, T. Fuyuki
    Title: Reliability of Low-temperature Poly-Si TFTs with LDD Structures
    Journal: Japanese Journal of Applied Physics, Vol. 42, pp. 4257-4260
    Year: 2003
  69. Authors: FURUTA, Mamoru, H. Satani, T. Terashita, T. Tamura, Y. Tsuchihashi
    Title: Hydrogen Implantation Damage in Polycrystalline Silicon Thin Film Transistors Caused by Ion Doping
    Journal: Japanese Journal of Applied Physics, Vol. 41, pp. 1259-1264
    Year: 2002
  70. Authors: FURUTA, Mamoru, T. Kawamura, T. Yoshioka, Y. Miyata
    Title: Bottom-Gate Poly-Si Thin Film Transistors using XeCl Excimer Laser Annealing and Ion Doping
    Journal: IEEE Transaction on Electron Devices, Vol. 40, pp. 1964-1969
    Year: 1993
  71. Authors: Y. Miyata, FURUTA, Mamoru, T. Yoshioka, T. Kawamura
    Title: Polycrystalline Silicon Recrystallized with Excimer Laser Irradiation and Impurity Doping using Ion Doping Method
    Journal: Journal of Applied Physics, Vol. 73, pp. 3271-3275
    Year: 1993
  72. Authors: Y. Miyata, FURUTA, Mamoru, T. Yoshioka, T. Kawamura
    Title: Low-Temperature Polycrystalline Silicon Thin-Film Transistors for Large-Area Liquid Crystal Display
    Journal: Japanese Journal of Applied Physics, Vol. 31, pp. 4559-4562
    Year: 1992
  73. Authors: K. Okamoto, FURUTA, Mamoru, K. Yamaguchi
    Title: Zn and Si Doping in {110} GaAs Epilayers Grown by Metalorganic Chemical Vapor Deposition
    Journal: Japanese Journal of Applied Physics, Vol. 27, pp. L2121-L2124
    Year: 1988
  74. Authors: K. Okamoto, FURUTA, Mamoru, K. Yamaguchi
    Title: Lateral Growth on (110) GaAs Substrates by Metalorganic Chemical Vapor Deposition
    Journal: Japanese Journal of Applied Physics, Vol. 27, pp. L437-L440
    Year: 1988

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Grants-in-Aid for Scientific Research from the Japanese government ▼

  1. Project title: Zinc oxide transparent transistor and its application to stacked image sensor
    Category: Grant-in-Aid for Scientific Research(C)
    Project number: 
    Project period: 2011/04-2014/03
    Total budget amount: 5,330,000 yen
    Keywords: 

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