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Areas of specialization | |
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Laboratory/research office |
Material Innovation & Sustainable Technology Laboratory
We are currently engaged in research on the physics of mist droplets; research & development of novel technology using mist droplets; research & development of novel functional thin film fabrication techniques under atmospheric pressure; thin film fabrication and property evaluation; and thin film device fabrication and characteristics evaluation. |
Current reseach topics | |
Educational background |
2008: Doctor
2005: Master 2003: Bachelor |
Professional background |
2012-:
2011-2011: 2010-2012: 2008-2010: 2008-2011: 2007-2008: 2006-2007: 2005-: 2004-2007: |
Licenses | Academic societies |
Courses * Courses provided in English are shown with (E) mark
Undergraduate school ▼
Graduation Thesis
Graduate school ▼
Seminar 1
Seminar 2
Seminar 3
Seminar 4
Individual Work for Graduate
Seminar 2
Seminar 3
Seminar 4
Individual Work for Graduate
Research activities
Research papers ▼
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Authors: KAWAHARAMURA, Toshiyuki, Dang Thai Giang, NITTA Noriko
Title: Atmospheric-Pressure Epitaxial Growth Technique of a Multiple Quantum Well by Mist Chemical Vapor Deposition based on Leidenfrost droplets
Journal: Appl. Phys. Lett., Vol. 109, No. 15, AIP Publishing Journals
Year: 2016/10/10 -
Authors: Chandan Biswas, Zhu Ma, Xiaodan Zhu, KAWAHARAMURA, Toshiyuki, Kang L. Wang
Title: Atmospheric growth of hybrid ZnO thin films for inverted polymer solar cells
Journal: Solar Energy Materials and Solar Cells, Vol. 157, pp. 1048-1056
Year: 2016/09/04 -
Authors: Giang T. Dang, Takayuki Uchida, KAWAHARAMURA, Toshiyuki, FURUTA Mamoru, Adam R. Hyndman, Rodrigo Martinez, Shizuo Fujita, Roger J. Reeves, Martin W. Allen
Title: Silver Oxide Schottky Contacts and Metal Semiconductor Field-Effect Transistors on SnO2 thin films
Journal: Applied Physics Express, Vol. 9, p. 041101, the Japan Society for the Promotion of Science
Year: 2016/02/29 -
Authors: Shirahata Takahiro, KAWAHARAMURA, Toshiyuki, Fujita Shizuo, Orita Hiroyuki
Title: Transparent conductive zinc-oxide-based films grown at low temperature by mist chemical vapor deposition
Journal: Thin Solid Film, Vol. 597, pp. 30-38, Elsevier
Year: 2015/11/03 -
Authors: Xiaodan Zhu, KAWAHARAMURA, Toshiyuki, Adam Z Stieg, Chandan Biswas, Lu Li, Zhu Ma, Mark A. Zurbuchen, Qibing Pei, Kang L Wang
Title: Atmospheric and Aqueous Deposition of Polycrystalline Metal Oxides Using Mist-CVD for Highly Efficient Inverted Polymer Solar Cells
Journal: Nano Letters, Vol. 15, pp. 4948-4954, American Chemical Society
Year: 2015/07/06 -
Authors: Giang T. Dang, KAWAHARAMURA, Toshiyuki, FURUTA, Mamoru, Martin W. Allen
Title: Metal-Semiconductor Field-Effect Transistors With In–Ga–Zn–O Channel Grown by Nonvacuum-Processed Mist Chemical Vapor Deposition
Journal: Electron Device Letters, IEEE, Vol. 36, No. 5, pp. 463-465, IEEE
Year: 2015/03/11 -
Authors: KAWAHARAMURA, Toshiyuki
Title: Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets; control of precursor flow
Journal: Jpn. J. Appl. Phys., Vol. 53, No. 5S1, p. 05FF08
Year: 2014/04/25 -
Authors: Shizuo Fujita, Kentaro Kaneko, Takumi Ikenoue, KAWAHARAMURA, Toshiyuki, FURUTA, Mamoru
Title: Ultrasonic-assisted mist chemical vapor deposition of II-oxide and related oxide compounds
Journal: physica status solidi (c), Vol. 11, No. 7-8, pp. 1225-1228
Year: 2014/04 -
Authors: Takayuki Uchida, KAWAHARAMURA, Toshiyuki, Kenji Shibayama, Shizuo Fujita, Takahiro Hiramatsu, Hiroyuki Orita
Title: Mist chemical vapor deposition of aluminum oxide thin films for rear surface passivation of crystalline silicon solar cells
Journal: Applied Physics Express, Vol. 7, No. 2, p. 021303
Year: 2014/02 -
Authors: FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki, WANG,Dapeng, Tatsuya Toda, HIRAO, Takashi
Title: Electrical Properties of the Thin-Film Transistor With an Indium–Gallium–Zinc Oxide Channel and an Aluminium Oxide Gate Dielectric Stack Formed by Solution-Based Atmospheric Pressure Deposition
Journal: IEEE Electron Device Letters, Vol. 33, No. 6, pp. 851-853, IEEE
Year: 2012/05/08 -
Authors: KAWAHARAMURA, Toshiyuki, Tai Jan Dan, FURUTA, Mamoru
Title: Successful Growth of Conductive Highly Crystalline Sn-Doped a-Ga2O3 Thin Films by Fine-Channel Mist Chemical Vapor Deposition
Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 040207-1-040207-3, Japan Society of Applied Physics
Year: 2012/03/26 -
Authors: S. Shimakawa, Y. Kamada, KAWAHARAMURA, Toshiyuki, WANG,Dapeng, LI, Chaoyang, S. Fujita, HIRAO, Takashi, FURUTA, Mamoru
Title: Photo-Leakage Current of Thin-Film Transistors with ZnO Channels Formed at Various Oxygen Partial Pressures under Visible Light Irradiation
Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 03CB04-1-03CB04-4, Japan Society of Applied Physics
Year: 2012/03/21 -
Authors: MOMOTA, Sadao, Jango Hangu, Takuya Toyonaga, Hikaru Terauchi, Kazuki Maeda, Jun Taniguchi, HIRAO, Takashi, FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki
Title: Control of swelling height of Si crystal by irradiating Ar beam
Journal: Journal of Nanoscience and Nanotechnology, Vol. 12, No. 1, pp. 552-556, American Scientific Publishers
Year: 2012/01 -
Authors: Tai Jan Dan, KAWAHARAMURA, Toshiyuki, NITTA, Noriko, HIRAO, Takashi, T. Yoshiie, TANIWAKI, Masafumi
Title: Photoluminescence, morphology, and structure of hydrothermal ZnO implanted at room temperature with 60 keV Sn ions
Journal: J. Appl. Phys., Vol. 109, p. 123516
Year: 2011 -
Authors: Tai Jan Dan, KAWAHARAMURA, Toshiyuki, HIRAO, Takashi, NITTA, Noriko, TANIWAKI, Masafumi
Title: Characteristics of ZnO Wafers Implanted with 60 keV Sn+ Ions at Room Temperature and at 110 K
Journal: AIP Conference Proceedings , Vol. 1321, pp. 270-273, American Institute of Physics
Year: 2011 -
Authors: H. Furuta, T. Kawaharamura, M. Furuta, K. Kawabata, T. Hirao, T. Komukai, K. Yoshihara, Y. Shimomoto, T. Oguchi
Title: Crystal Structure Analysis of Multiwalled Carbon Nanotube Forests by Newly Developed Cross-Sectional XRD Measurement
Journal: Applied Physics Express, Vol. 3, pp. 105101-1-105101-3, The Japan Society of Applied Physics
Year: 2010/09/17 -
Authors: H. Furuta, T. Kawaharamura, K. Kawabata, M. Furuta, T. Matsuda, C. Li, T. Hirao
Title: High-Density Short-Height Directly Grown CNT Patterned Emitter on Glass
Journal: e-Journal of Surface Science and Nanotechnology, Vol. 8, pp. 336-339, The Surface Science Society of Japan
Year: 2010/07/13 -
Authors: T. Hiramatsu, T. Matsuda, H. Furuta, H. Nitta, T. Kawaharamura, C. Li, M. Furuta, T. Hirao
Title: Effect of Pulsed Substrate Bias on Film Properties of SiO2 Deposited by Inductively Coupled Plasma Deposition
Journal: Japanese Journal Applied Physics, Vol. 49, pp. 03CA03-1-03CA03-4
Year: 2010/03/23 -
Authors: Chaoyang Li, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Hiroshi Furuta, Mamoru Furuta, Takahiro Hiramatsu, Takashi Hirao, Yoichiro Nakanishi, Keiji Ichi
Title: Comparison of structural and photoluminescence properties of ZnO nano-structures influenced by gas ratio and substrate bias during radio frequency sputtering
Journal: J. Vac. Sci. Technol. B, Vol. 28, No. 2, pp. C2B51-55
Year: 2010 -
Authors: FURUTA, Mamoru, T. Nakanishi, M. Kimura, T. Hiramatsu, T. Matsuda, KAWAHARAMURA, Toshiyuki, FURUTA, Hiroshi, HIRAO, Takashi
Title: Effect of Surface Treatment of Gate-insulator on Uniformity in Bottom-gate ZnO Thin-film Transistors
Journal: Electrochemical and Solid-State Letters, Vol. 13, pp. H101-H104
Year: 2010 -
Authors: Chaoyang Li, Toshiyuki Kawaharamura, Tokiyoshi Matsuda, Hiroshi Furuta, Takahiro Hiramatsu, FURUTA, Mamoru, Takashi Hirao
Title: Intense green cathodoluminescence from low-temperature-deposited ZnO film with fluted hexagonal cone nanostructures
Journal: Appl. Phys. Express, Vol. 2, pp. 091601-091603
Year: 2009 -
Authors: Toshiyuki Kawaharamura, Hiroyuki Nishinaka, Jian-Guo Lu, Yudai Kamada, Yoshio Masuda, Shizuo Fujita
Title: Mist CVD growth of ZnO-based thin films and nanostructures
Journal: J. Korean Physical Society, Vol. 53, pp. 2976-2980
Year: 2008 -
Authors: K. Ozga, KAWAHARAMURA, Toshiyuki, A. AliUmar, M. Oyama, K. Nouneh, A Slezak, S. Fujita, M. Piasecki, A. H. Reshak, I. V. Kityk
Title: Second order optical effects in Au nanoparticle-deposited ZnO nanocrystallite films
Journal: Nanotechnology, Vol. 19, pp. 185709-1-185709-6
Year: 2008 -
Authors: Toshiyuki Kawaharamura, Shizuo Fujita
Title: An approach of making single crystalline zinc oxide thin film with fine channel mist chemical vapor deposition method
Journal: Physica Stat. Sol. (c), Vol. 5, pp. 3138-3140
Year: 2008 -
Authors: Toshiyuki Kawaharamura, Hiroyuki Nishinaka, Shizuo Fujita
Title: Growth of crystalline zinc oxide thin films by fine channel mist chemical vapor deposition
Journal: Jpn. J. Appl. Phys., Vol. 47, pp. 4669-4675
Year: 2008 -
Authors: Hiroyuki Nishinaka, KAWAHARAMURA, Toshiyuki, Shizuo Fujita
Title: Low-temperature growth of ZnO thin films by linear source utrasonic spray chemical vapor deposition
Journal: Japanese Journal of Applied Physics, Vol. 46, pp. 6811-6813
Year: 2007 -
Authors: Yudai Kamada, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita
Title: Fabrication of ZnO and ZnMgO thin films and UV photodetectors by mist chemical vapor deposition method
Journal: Mater. Res. Soc. Symp. Proc., Vol. 957, p. K07-27
Year: 2007 -
Authors: Jian-Guo Lu, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita
Title: Roles of hydrogen and nitrogen in p-type doping of ZnO
Journal: Chemical Physics Letters, Vol. 441, pp. 68-71
Year: 2007 -
Authors: Jian-Guo Lu, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Yudai Kamada, Takayoshi Oshima, Shizuo Fujita
Title: ZnO-based thin films synthesized by atmospheric pressure mist chemical vapor deposition
Journal: Journal of Crystal Growth, Vol. 299, pp. 1-10
Year: 2007 -
Authors: Yudai Kamada, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita
Title: Linear-source ultrasonic spray chemical vapor deposition method for fabrication of ZnMgO films and ultraviolet photodetectors
Journal: Japanese Journal of Applied Physics, Vol. 45, pp. L857-L859
Year: 2006 -
Authors: Jian-Guo Lu, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Yudai Kamada, Takayoshi Oshima, Shizuo Fujita
Title: Carrier concentrationinduced band-gap shift in Al-doped Zn1-xMgxO thin films
Journal: Applied Physics Letters, Vol. 89, pp. 262107_1-262107_3
Year: 2006
Keynote lectures ▼
Invited lectures ▼
- , 2016/09/06
- , 2016/06/28
- Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow, The 76th JSAP Autumn Meeting, 2015, Nagoya Congress Center, Nagoya, 2015/09/15
- Fabrication of Functional Thin Films and Electrical Devices by Mist CVD Equipping Highly Accurate Flow Control Technology under Atmospheric Pressure, AWAD, Jeju, Korea, 2015/06/30
Notable projects ▼
Awards ▼
- The 37th JSAP Outstanding Paper Award, 2015, JSAP Young Scientist Award, JSAP, 2015
- 2014 JSAP Poster Award, The Japan Society of Applied Physics, 2014
Patents ▼
Grants-in-Aid for Scientific Research from the Japanese government ▼
Competitive research funds ▼
Social activities
Committee roles ▼
- Secretary of Program Committee, International Conference on Solid State Devices and Materials , 2013-2016
Associate Professor KAWAHARAMURA, Toshiyuki
Center for Nanotechnology, Research Institute
Laboratory for Unified Quantum Devices, Research Institute
Laboratory for Structural Nanochemistry, Research Institute