Faculty Members


Associate Professor KAWAHARAMURA, Toshiyuki

Year of birth 1980 Gender Male
Affiliation School of Systems Engineering
Center for Nanotechnology, Research Institute
Laboratory for Unified Quantum Devices, Research Institute
Laboratory for Structural Nanochemistry, Research Institute
Job titles
Personal web site http://www.nano.kochi-tech.ac.jp/tosiyuki/index.html

Areas of specialization
Laboratory/research office Material Innovation & Sustainable Technology Laboratory
We are currently engaged in research on the physics of mist droplets; research & development of novel technology using mist droplets; research & development of novel functional thin film fabrication techniques under atmospheric pressure; thin film fabrication and property evaluation; and thin film device fabrication and characteristics evaluation.
Current reseach topics
Educational background 2008: Doctor
2005: Master
2003: Bachelor
Professional background 2012-: 
Academic societies

Courses  * Courses provided in English are shown with (E) mark

Undergraduate school ▼

Graduation Thesis

Graduate school ▼

Seminar 1
Seminar 2
Seminar 3
Seminar 4
Individual Work for Graduate

Research activities

Research papers ▼

  1. Authors: KAWAHARAMURA, Toshiyuki, Dang Thai Giang, NITTA Noriko
    Title: Atmospheric-Pressure Epitaxial Growth Technique of a Multiple Quantum Well by Mist Chemical Vapor Deposition based on Leidenfrost droplets
    Journal: Appl. Phys. Lett., Vol. 109, No. 15, AIP Publishing Journals
    Year: 2016/10/10
  2. Authors: Chandan Biswas, Zhu Ma, Xiaodan Zhu, KAWAHARAMURA, Toshiyuki, Kang L. Wang
    Title: Atmospheric growth of hybrid ZnO thin films for inverted polymer solar cells
    Journal: Solar Energy Materials and Solar Cells, Vol. 157, pp. 1048-1056
    Year: 2016/09/04
  3. Authors: Giang T. Dang, Takayuki Uchida, KAWAHARAMURA, Toshiyuki, FURUTA Mamoru, Adam R. Hyndman, Rodrigo Martinez, Shizuo Fujita, Roger J. Reeves, Martin W. Allen
    Title: Silver Oxide Schottky Contacts and Metal Semiconductor Field-Effect Transistors on SnO2 thin films
    Journal: Applied Physics Express, Vol. 9, p. 041101, the Japan Society for the Promotion of Science
    Year: 2016/02/29
  4. Authors: Shirahata Takahiro, KAWAHARAMURA, Toshiyuki, Fujita Shizuo, Orita Hiroyuki
    Title: Transparent conductive zinc-oxide-based films grown at low temperature by mist chemical vapor deposition
    Journal: Thin Solid Film, Vol. 597, pp. 30-38, Elsevier
    Year: 2015/11/03
  5. Authors: Xiaodan Zhu, KAWAHARAMURA, Toshiyuki, Adam Z Stieg, Chandan Biswas, Lu Li, Zhu Ma, Mark A. Zurbuchen, Qibing Pei, Kang L Wang
    Title: Atmospheric and Aqueous Deposition of Polycrystalline Metal Oxides Using Mist-CVD for Highly Efficient Inverted Polymer Solar Cells
    Journal: Nano Letters, Vol. 15, pp. 4948-4954, American Chemical Society
    Year: 2015/07/06
  6. Authors: Giang T. Dang, KAWAHARAMURA, Toshiyuki, FURUTA, Mamoru, Martin W. Allen
    Title: Metal-Semiconductor Field-Effect Transistors With In–Ga–Zn–O Channel Grown by Nonvacuum-Processed Mist Chemical Vapor Deposition
    Journal: Electron Device Letters, IEEE, Vol. 36, No. 5, pp. 463-465, IEEE
    Year: 2015/03/11
  7. Authors: KAWAHARAMURA, Toshiyuki
    Title: Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets; control of precursor flow
    Journal: Jpn. J. Appl. Phys., Vol. 53, No. 5S1, p. 05FF08
    Year: 2014/04/25
  8. Authors: Shizuo Fujita, Kentaro Kaneko, Takumi Ikenoue, KAWAHARAMURA, Toshiyuki, FURUTA, Mamoru
    Title: Ultrasonic-assisted mist chemical vapor deposition of II-oxide and related oxide compounds
    Journal: physica status solidi (c), Vol. 11, No. 7-8, pp. 1225-1228
    Year: 2014/04
  9. Authors: Takayuki Uchida, KAWAHARAMURA, Toshiyuki, Kenji Shibayama, Shizuo Fujita, Takahiro Hiramatsu, Hiroyuki Orita
    Title: Mist chemical vapor deposition of aluminum oxide thin films for rear surface passivation of crystalline silicon solar cells
    Journal: Applied Physics Express, Vol. 7, No. 2, p. 021303
    Year: 2014/02
  10. Authors: FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki, WANG,Dapeng, Tatsuya Toda, HIRAO, Takashi
    Title: Electrical Properties of the Thin-Film Transistor With an Indium–Gallium–Zinc Oxide Channel and an Aluminium Oxide Gate Dielectric Stack Formed by Solution-Based Atmospheric Pressure Deposition
    Journal: IEEE Electron Device Letters, Vol. 33, No. 6, pp. 851-853, IEEE
    Year: 2012/05/08
  11. Authors: KAWAHARAMURA, Toshiyuki, Tai Jan Dan, FURUTA, Mamoru
    Title: Successful Growth of Conductive Highly Crystalline Sn-Doped a-Ga2O3 Thin Films by Fine-Channel Mist Chemical Vapor Deposition
    Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 040207-1-040207-3, Japan Society of Applied Physics 
    Year: 2012/03/26
  12. Authors: S. Shimakawa, Y. Kamada, KAWAHARAMURA, Toshiyuki, WANG,Dapeng, LI, Chaoyang, S. Fujita, HIRAO, Takashi, FURUTA, Mamoru
    Title: Photo-Leakage Current of Thin-Film Transistors with ZnO Channels Formed at Various Oxygen Partial Pressures under Visible Light Irradiation
    Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 03CB04-1-03CB04-4, Japan Society of Applied Physics 
    Year: 2012/03/21
  13. Authors: MOMOTA, Sadao, Jango Hangu, Takuya Toyonaga, Hikaru Terauchi, Kazuki Maeda, Jun Taniguchi, HIRAO, Takashi, FURUTA, Mamoru, KAWAHARAMURA, Toshiyuki
    Title: Control of swelling height of Si crystal by irradiating Ar beam
    Journal: Journal of Nanoscience and Nanotechnology, Vol. 12, No. 1, pp. 552-556, American Scientific Publishers
    Year: 2012/01
  14. Authors: Tai Jan Dan, KAWAHARAMURA, Toshiyuki, NITTA, Noriko, HIRAO, Takashi, T. Yoshiie, TANIWAKI, Masafumi
    Title: Photoluminescence, morphology, and structure of hydrothermal ZnO implanted at room temperature with 60 keV Sn ions
    Journal: J. Appl. Phys., Vol. 109, p. 123516
    Year: 2011
  15. Authors: Tai Jan Dan, KAWAHARAMURA, Toshiyuki, HIRAO, Takashi, NITTA, Noriko, TANIWAKI, Masafumi
    Title: Characteristics of ZnO Wafers Implanted with 60 keV Sn+ Ions at Room Temperature and at 110 K
    Journal: AIP Conference Proceedings , Vol. 1321, pp. 270-273, American Institute of Physics
    Year: 2011
  16. Authors: H. Furuta, T. Kawaharamura, M. Furuta, K. Kawabata, T. Hirao, T. Komukai, K. Yoshihara, Y. Shimomoto, T. Oguchi
    Title: Crystal Structure Analysis of Multiwalled Carbon Nanotube Forests by Newly Developed Cross-Sectional XRD Measurement
    Journal: Applied Physics Express, Vol. 3, pp. 105101-1-105101-3, The Japan Society of Applied Physics
    Year: 2010/09/17
  17. Authors: H. Furuta, T. Kawaharamura, K. Kawabata, M. Furuta, T. Matsuda, C. Li, T. Hirao
    Title: High-Density Short-Height Directly Grown CNT Patterned Emitter on Glass
    Journal: e-Journal of Surface Science and Nanotechnology, Vol. 8, pp. 336-339, The Surface Science Society of Japan
    Year: 2010/07/13
  18. Authors: T. Hiramatsu, T. Matsuda, H. Furuta, H. Nitta, T. Kawaharamura, C. Li, M. Furuta, T. Hirao
    Title: Effect of Pulsed Substrate Bias on Film Properties of SiO2 Deposited by Inductively Coupled Plasma Deposition
    Journal: Japanese Journal Applied Physics, Vol. 49, pp. 03CA03-1-03CA03-4
    Year: 2010/03/23
  19. Authors: Chaoyang Li, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Hiroshi Furuta, Mamoru Furuta, Takahiro Hiramatsu, Takashi Hirao, Yoichiro Nakanishi, Keiji Ichi
    Title: Comparison of structural and photoluminescence properties of ZnO nano-structures influenced by gas ratio and substrate bias during radio frequency sputtering
    Journal: J. Vac. Sci. Technol. B, Vol. 28, No. 2, pp. C2B51-55
    Year: 2010
  20. Authors: FURUTA, Mamoru, T. Nakanishi, M. Kimura, T. Hiramatsu, T. Matsuda, KAWAHARAMURA, Toshiyuki, FURUTA, Hiroshi, HIRAO, Takashi
    Title: Effect of Surface Treatment of Gate-insulator on Uniformity in Bottom-gate ZnO Thin-film Transistors
    Journal: Electrochemical and Solid-State Letters, Vol. 13, pp. H101-H104
    Year: 2010
  21. Authors: Chaoyang Li, Toshiyuki Kawaharamura, Tokiyoshi Matsuda, Hiroshi Furuta, Takahiro Hiramatsu, FURUTA, Mamoru, Takashi Hirao
    Title: Intense green cathodoluminescence from low-temperature-deposited ZnO film with fluted hexagonal cone nanostructures
    Journal: Appl. Phys. Express, Vol. 2, pp. 091601-091603
    Year: 2009
  22. Authors: Toshiyuki Kawaharamura, Hiroyuki Nishinaka, Jian-Guo Lu, Yudai Kamada, Yoshio Masuda, Shizuo Fujita
    Title: Mist CVD growth of ZnO-based thin films and nanostructures
    Journal: J. Korean Physical Society, Vol. 53, pp. 2976-2980
    Year: 2008
  23. Authors: K. Ozga, KAWAHARAMURA, Toshiyuki, A. AliUmar, M. Oyama, K. Nouneh, A Slezak, S. Fujita, M. Piasecki, A. H. Reshak, I. V. Kityk
    Title: Second order optical effects in Au nanoparticle-deposited ZnO nanocrystallite films
    Journal: Nanotechnology, Vol. 19, pp. 185709-1-185709-6
    Year: 2008
  24. Authors: Toshiyuki Kawaharamura, Shizuo Fujita
    Title: An approach of making single crystalline zinc oxide thin film with fine channel mist chemical vapor deposition method
    Journal: Physica Stat. Sol. (c), Vol. 5, pp. 3138-3140
    Year: 2008
  25. Authors: Toshiyuki Kawaharamura, Hiroyuki Nishinaka, Shizuo Fujita
    Title: Growth of crystalline zinc oxide thin films by fine channel mist chemical vapor deposition
    Journal: Jpn. J. Appl. Phys., Vol. 47, pp. 4669-4675
    Year: 2008
  26. Authors: Hiroyuki Nishinaka, KAWAHARAMURA, Toshiyuki, Shizuo Fujita
    Title: Low-temperature growth of ZnO thin films by linear source utrasonic spray chemical vapor deposition
    Journal: Japanese Journal of Applied Physics, Vol. 46, pp. 6811-6813
    Year: 2007
  27. Authors: Yudai Kamada, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita
    Title: Fabrication of ZnO and ZnMgO thin films and UV photodetectors by mist chemical vapor deposition method
    Journal: Mater. Res. Soc. Symp. Proc., Vol. 957, p. K07-27
    Year: 2007
  28. Authors: Jian-Guo Lu, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita
    Title: Roles of hydrogen and nitrogen in p-type doping of ZnO
    Journal: Chemical Physics Letters, Vol. 441, pp. 68-71
    Year: 2007
  29. Authors: Jian-Guo Lu, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Yudai Kamada, Takayoshi Oshima, Shizuo Fujita
    Title: ZnO-based thin films synthesized by atmospheric pressure mist chemical vapor deposition
    Journal: Journal of Crystal Growth, Vol. 299, pp. 1-10
    Year: 2007
  30. Authors: Yudai Kamada, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita
    Title: Linear-source ultrasonic spray chemical vapor deposition method for fabrication of ZnMgO films and ultraviolet photodetectors
    Journal: Japanese Journal of Applied Physics, Vol. 45, pp. L857-L859
    Year: 2006
  31. Authors: Jian-Guo Lu, KAWAHARAMURA, Toshiyuki, Hiroyuki Nishinaka, Yudai Kamada, Takayoshi Oshima, Shizuo Fujita
    Title: Carrier concentrationinduced band-gap shift in Al-doped Zn1-xMgxO thin films
    Journal: Applied Physics Letters, Vol. 89, pp. 262107_1-262107_3
    Year: 2006

Keynote lectures ▼

Invited lectures ▼

  1. , 2016/09/06
  2. , 2016/06/28
  3. Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow, The 76th JSAP Autumn Meeting, 2015, Nagoya Congress Center, Nagoya, 2015/09/15
  4. Fabrication of Functional Thin Films and Electrical Devices by Mist CVD Equipping Highly Accurate Flow Control Technology under Atmospheric Pressure, AWAD, Jeju, Korea, 2015/06/30

Notable projects ▼

Awards ▼

  1. The 37th JSAP Outstanding Paper Award, 2015, JSAP Young Scientist Award, JSAP, 2015
  2. 2014 JSAP Poster Award, The Japan Society of Applied Physics, 2014

Patents ▼

Grants-in-Aid for Scientific Research from the Japanese government ▼

Competitive research funds ▼

Social activities

Committee roles ▼

  1. Secretary of Program Committee, International Conference on Solid State Devices and Materials , 2013-2016

Published books ▼