Faculty Members

Professor
KAWAHARAMURA, Toshiyuki

Year of birth: 1980
Gender: Male
Affiliation:

- School of Systems Engineering
- Intelligent Mechanical Systems Engineering Course, Department of Engineering, Graduate School of Enginering
- Research Unit for Advanced Functional Materials and Devices, Center for Nanotechnology, Research Institute
Personal web site: http://www.nano.kochi-tech.ac.jp/tosiyuki/index-E.html
researchmap： https://researchmap.jp/TKawaharamura
Article from the "Cutting-edge Research and Social Contribution"：
https://www.kochi-tech.ac.jp/english/power/research/development_of_a_non-vacuum_process_to_achieve_high_quality_functional_thin_film_fabrication.html

Areas of specialization
Laboratory/research office	Lab. of Material Innovation & Sustainable TechnologyLab. of MIST Development of mist CVD process and research on functional thin films and devices Research on the behavior of mist droplets and development of the power source using the same Development of an innovative transportation system
Current research topics
Educational background
Professional background
Licenses
Academic societies

You can see the continuation of the table with a side swipe.

Courses

* Courses provided in English are shown with (E) mark

Undergraduate school	Graduation Thesis Basic Thermodynamics Advanced Thermodynamics for Engineering English for Engineering
Graduate school	Applied Thermodynamics Individual Work for Graduate Seminar 1 Seminar 3 Advanced Seminar 1 Advanced Seminar 2

You can see the continuation of the table with a side swipe.

Research activities

Research papers	Authors: Yoko Taniguchi, Hiroyuki Nishinaka, Kazuki Shimazoe, Toshiyuki Kawaharamura, Kazutake Kanegae, Masahiro Yoshimoto Title: Visible-light absorption of indium oxide thin films via Bi3+ doping for visible-light-responsive photocatalysis Journal: Materials Chemistry and Physics , Vol. 315, p. 128961 Year: 2024 Authors: Toshiyuki Kawaharamura, Misaki Nishi, Liu Li, Phimolphan Rutthongjan, Yuna Ishikawa, Masahito Sakamoto, Tatsuya Yasuoka, Kanta Asako, Tamako Ozaki, Miyabi Fukue, Mariko Ueda, Shota Sato, Dang Thai Giang Title: Growth mechanism under the supply limited regime in mist CVD: presumption of mist droplet state in high temperature field Journal: Japanese Journal of Applied Physics, Vol. 63, p. 015502 Year: 2023 Authors: Liu Li, Mariko Ueda, Toshiyuki Kawaharamura Title: Characterization and study of high conductivity antimony-doped tin oxide thin films grown by mist chemical vapor deposition Journal: RSC Adv., Vol. 13, p. 13456 Year: 2023 Authors: Xiaojiao Liu, Dang Thai Giang, Liu Li, Toshiyuki Kawaharamura Title: Fabrication of Zn1-xMgxO/AgyO heterojunction diodes by mist CVD at atmospheric pressure Journal: Applied Surface Science, Vol. 596, p. 153465 Year: 2022 Authors: Dang Thai Giang, Tatsuya Yasuoka, Toshiyuki Kawaharamura Title: Sub-μm features patterned with laser interference lithography for the epitaxial lateral overgrowth of α-Ga2O3 via mist chemical vapor deposition Journal: Applied Physics Letters, Vol. 119, p. 041902 Year: 2021 Authors: Liu Li, Toshiyuki Kawaharamura, Masahito Sakamoto, Misaki Nishi, Dang Thai Giang, Shota Sato Title: The Quality Improvement of Yttrium Oxide Thin Films Grown at Low Temperature via the Third-Generation Mist Chemical Vapor Deposition Using Oxygen-Supporting Sources Journal: PHYSICA STATUS SOLIDI B , Vol. 2021, p. 2100105 Year: 2021 Authors: Tatsuya Yasuoka, Liu Li, Tamako Ozaki, Kanta Asako, Yuna Ishikawa, Miyabi Fukue, Dang Thai Giang, Toshiyuki Kawaharamura Title: The effect of HCl on the α-Ga2O3 thin films fabricated by third generation mist chemical vapor deposition Journal: AIP Advances, Vol. 11, p. 045123 Year: 2021 Authors: Leila Ghadbeigi, Jacqueline Cooke, Dang Thai Giang, Toshiyuki Kawaharamura, Tatsuya Yasuoka, Rujun Sun, Praneeth Ranga, Sriram Krishnamoorthy, Michael A. Scarpulla, Berardi Sensale-Rodriguez Title: Optical Characterization of Gallium Oxide α and β Polymorph Thin-Films Grown on c-Plane Sapphire Journal: Journal of Electronic Materials, Vol. 50, pp. 2990-2998 Year: 2021 Authors: Dang Thai Giang, Yuki Tagashira, Tatsuya Yasuoka, Liu Li, Toshiyuki Kawaharamura Title: Conductive Si-doped α-(AlxGa1-x)2O3 Thin Films with the Band Gaps up to 6.22 eV Journal: AIP Advances , Vol. 10, p. 115019 Year: 2020 Authors: Dang Thai Giang, Shota Sato, Yuki Tagashira, Tatsuya Yasuoka, Liu Li, Toshiyuki Kawaharamura Title: α-(AlxGa1−x)2O3 single-layer and heterostructure buffers for the growth of conductive Sn-doped α-Ga2O3 thin films via mist chemical vapor deposition Journal: APL Mater., Vol. 8, p. 101101 Year: 2020 Authors: Daisuke Tahara, Hiroyuki Nishinaka, Shota Sato, Liu Li, Toshiyuki Kawaharamura, Masahiro Yoshimoto, Minoru Noda Title: Mist chemical vapor deposition study of 20 and 100 nm thick undoped ferroelectric hafnium oxide films on n+-Si(100) substrates Journal: Japanese Journal of Applied Physics, Vol. 58, p. SLLB10 Year: 2019 Authors: Dang Thai Giang, Martin Allen, Mamoru Furuta, Toshiyuki Kawaharamura Title: Electronic devices fabricated on mist-CVD-grown oxide semiconductors and their applications Journal: Japanese Journal of Applied Physics, Vol. 58, p. 090606 Year: 2019 Authors: Phimolphan Rutthongjan, Misaki Nishi, Liu Li, Shota Sato, Yuya Okada, Dang Thai Giang, Toshiyuki Kawaharamura Title: Growth mechanism of Zinc Oxide thin film by mist chemical vapor deposition via the modulation of [H2O]/[Zn] ratios Journal: Appl. Phys. Express, Vol. 12, p. 065505 Year: 2019 Authors: Phimolphan Rutthongjan, LI LIU, Misaki Nishi, Masahito Sakamoto, Shota Sato, Ellawala Kankanamge Chandima Pradeep, Dang Thai Giang, Toshiyuki Kawaharamura Title: Composition control of Zn1-xMgxO thin films grown using mist chemical vapor deposition Journal: Japanese Journal of Applied Physics, Vol. 58, p. 035503 Year: 2019 Authors: Li Liu, Toshiyuki Kawaharamura, Dang Thai Giang, Ellawala Kankanamge Chandima Pradeep, Shota Sato, Takayuki Uchida, Shizuo Fujita, Takahiro Hiramatsu, Hiroshi Kobayashi, Hiroyuki Orita Title: Study on fabrication of conductive antimony doped tin oxide thin films (SnOx:Sb) by 3rd generation mist chemical vapor deposition Journal: Japanese Journal of Applied Physics, Vol. 58, p. 025502 Year: 2019 Authors: Dang Thai Giang, Yuta Suwa, Masahito Sakamoto, Li Liu, Phimolphan Rutthongjan, Shota Sato, Tatsuya Yasuoka, Ryo Hasegawa, Toshiyuki Kawaharamura Title: Growth of α-Cr2O3 single crystals by mist CVD using ammonium dichromate Journal: Applied Physics Express, Vol. 11, p. 111101, The Japan Society of Applied Physics Year: 2018 Authors: Giang T. Dang, Tatsuya Yasuoka, Yuki Tagashira, Toshiyasu Tadokoro, Wolfgang Theiss, Toshiyuki Kawaharamura Title: Bandgap engineering of α-(AlxGa1-x)2O3 by a mist chemical vapor deposition two-chamber system and verification of Vegard's Law Journal: Appl. Phys. Lett., Vol. 113, p. 062102 Year: 2018 Authors: Ellawala Kankanamge Chandima Pradeep, Masataka Ohtani, Kazuya Kobiro, Toshiyuki Kawaharamura Title: Single-step simple solvothermal synthetic approach to ultra-fine MgO nanocrystals using high-temperature and high-pressure acetonitrile Journal: Chem. Lett., Vol. 46, pp. 940-943 Year: 2017 Authors: KAWAHARAMURA Toshiyuki, Dang Thai Giang, NITTA Noriko Title: Atmospheric-Pressure Epitaxial Growth Technique of a Multiple Quantum Well by Mist Chemical Vapor Deposition based on Leidenfrost droplets Journal: Appl. Phys. Lett., Vol. 109, No. 15, AIP Publishing Journals Year: 2016 Authors: Chandan Biswas, Zhu Ma, Xiaodan Zhu, KAWAHARAMURA Toshiyuki, Kang L. Wang Title: Atmospheric growth of hybrid ZnO thin films for inverted polymer solar cells Journal: Solar Energy Materials and Solar Cells, Vol. 157, pp. 1048-1056 Year: 2016 Authors: Giang T. Dang, Takayuki Uchida, KAWAHARAMURA Toshiyuki, FURUTA Mamoru, Adam R. Hyndman, Rodrigo Martinez, Shizuo Fujita, Roger J. Reeves, Martin W. Allen Title: Silver Oxide Schottky Contacts and Metal Semiconductor Field-Effect Transistors on SnO2 thin films Journal: Applied Physics Express, Vol. 9, p. 041101, the Japan Society for the Promotion of Science Year: 2016 Authors: Shirahata Takahiro, KAWAHARAMURA Toshiyuki, Fujita Shizuo, Orita Hiroyuki Title: Transparent conductive zinc-oxide-based films grown at low temperature by mist chemical vapor deposition Journal: Thin Solid Film, Vol. 597, pp. 30-38, Elsevier Year: 2015 Authors: Xiaodan Zhu, KAWAHARAMURA Toshiyuki, Adam Z Stieg, Chandan Biswas, Lu Li, Zhu Ma, Mark A. Zurbuchen, Qibing Pei, Kang L Wang Title: Atmospheric and Aqueous Deposition of Polycrystalline Metal Oxides Using Mist-CVD for Highly Efficient Inverted Polymer Solar Cells Journal: Nano Letters, Vol. 15, pp. 4948-4954, American Chemical Society Year: 2015 Authors: Giang T. Dang, KAWAHARAMURA Toshiyuki, FURUTA Mamoru, Martin W. Allen Title: Metal-Semiconductor Field-Effect Transistors With In–Ga–Zn–O Channel Grown by Nonvacuum-Processed Mist Chemical Vapor Deposition Journal: Electron Device Letters, IEEE, Vol. 36, No. 5, pp. 463-465, IEEE Year: 2015 Authors: KAWAHARAMURA Toshiyuki Title: Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets; control of precursor flow Journal: Jpn. J. Appl. Phys., Vol. 53, No. 5S1, p. 05FF08 Year: 2014 Authors: Shizuo Fujita, Kentaro Kaneko, Takumi Ikenoue, KAWAHARAMURA Toshiyuki, FURUTA Mamoru Title: Ultrasonic-assisted mist chemical vapor deposition of II-oxide and related oxide compounds Journal: physica status solidi (c), Vol. 11, No. 7-8, pp. 1225-1228 Year: 2014 Authors: Takayuki Uchida, KAWAHARAMURA Toshiyuki, Kenji Shibayama, Shizuo Fujita, Takahiro Hiramatsu, Hiroyuki Orita Title: Mist chemical vapor deposition of aluminum oxide thin films for rear surface passivation of crystalline silicon solar cells Journal: Applied Physics Express, Vol. 7, No. 2, p. 021303 Year: 2014 Authors: FURUTA Mamoru, KAWAHARAMURA Toshiyuki, WANGDapeng, Tatsuya Toda, HIRAO Takashi Title: Electrical Properties of the Thin-Film Transistor With an Indium–Gallium–Zinc Oxide Channel and an Aluminium Oxide Gate Dielectric Stack Formed by Solution-Based Atmospheric Pressure Deposition Journal: IEEE Electron Device Letters, Vol. 33, No. 6, pp. 851-853, IEEE Year: 2012 Authors: KAWAHARAMURA Toshiyuki, Tai Jan Dan, FURUTA Mamoru Title: Successful Growth of Conductive Highly Crystalline Sn-Doped a-Ga2O3 Thin Films by Fine-Channel Mist Chemical Vapor Deposition Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 040207-1-040207-3, Japan Society of Applied Physics　 Year: 2012 Authors: S. Shimakawa, Y. Kamada, KAWAHARAMURA Toshiyuki, WANGDapeng, LI Chaoyang, S. Fujita, HIRAO Takashi, FURUTA Mamoru Title: Photo-Leakage Current of Thin-Film Transistors with ZnO Channels Formed at Various Oxygen Partial Pressures under Visible Light Irradiation Journal: Japanese Journal of Applied Physics, Vol. 51, pp. 03CB04-1-03CB04-4, Japan Society of Applied Physics　 Year: 2012 Authors: MOMOTA Sadao, Jango Hangu, Takuya Toyonaga, Hikaru Terauchi, Kazuki Maeda, Jun Taniguchi, HIRAO Takashi, FURUTA Mamoru, KAWAHARAMURA Toshiyuki Title: Control of swelling height of Si crystal by irradiating Ar beam Journal: Journal of Nanoscience and Nanotechnology, Vol. 12, No. 1, pp. 552-556, American Scientific Publishers Year: 2012 Authors: Tai Jan Dan, KAWAHARAMURA Toshiyuki, HIRAO Takashi, NITTA Noriko, TANIWAKI Masafumi Title: Characteristics of ZnO Wafers Implanted with 60 keV Sn+ Ions at Room Temperature and at 110 K Journal: AIP Conference Proceedings , Vol. 1321, pp. 270-273, American Institute of Physics Year: 2011 Authors: Tai Jan Dan, KAWAHARAMURA Toshiyuki, NITTA Noriko, HIRAO Takashi, T. Yoshiie, TANIWAKI Masafumi Title: Photoluminescence, morphology, and structure of hydrothermal ZnO implanted at room temperature with 60 keV Sn ions Journal: J. Appl. Phys., Vol. 109, p. 123516 Year: 2011 Authors: H. Furuta, T. Kawaharamura, M. Furuta, K. Kawabata, T. Hirao, T. Komukai, K. Yoshihara, Y. Shimomoto, T. Oguchi Title: Crystal Structure Analysis of Multiwalled Carbon Nanotube Forests by Newly Developed Cross-Sectional XRD Measurement Journal: Applied Physics Express, Vol. 3, pp. 105101-1-105101-3, The Japan Society of Applied Physics Year: 2010 Authors: H. Furuta, T. Kawaharamura, K. Kawabata, M. Furuta, T. Matsuda, C. Li, T. Hirao Title: High-Density Short-Height Directly Grown CNT Patterned Emitter on Glass Journal: e-Journal of Surface Science and Nanotechnology, Vol. 8, pp. 336-339, The Surface Science Society of Japan Year: 2010 Authors: T. Hiramatsu, T. Matsuda, H. Furuta, H. Nitta, T. Kawaharamura, C. Li, M. Furuta, T. Hirao Title: Effect of Pulsed Substrate Bias on Film Properties of SiO2 Deposited by Inductively Coupled Plasma Deposition Journal: Japanese Journal Applied Physics, Vol. 49, pp. 03CA03-1-03CA03-4 Year: 2010 Authors: FURUTA Mamoru, T. Nakanishi, M. Kimura, T. Hiramatsu, T. Matsuda, KAWAHARAMURA Toshiyuki, FURUTA Hiroshi, HIRAO Takashi Title: Effect of Surface Treatment of Gate-insulator on Uniformity in Bottom-gate ZnO Thin-film Transistors Journal: Electrochemical and Solid-State Letters, Vol. 13, pp. H101-H104 Year: 2010 Authors: Chaoyang Li, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Hiroshi Furuta, Mamoru Furuta, Takahiro Hiramatsu, Takashi Hirao, Yoichiro Nakanishi, Keiji Ichi Title: Comparison of structural and photoluminescence properties of ZnO nano-structures influenced by gas ratio and substrate bias during radio frequency sputtering Journal: J. Vac. Sci. Technol. B, Vol. 28, No. 2, pp. C2B51-55 Year: 2010 Authors: Chaoyang Li, Toshiyuki Kawaharamura, Tokiyoshi Matsuda, Hiroshi Furuta, Takahiro Hiramatsu, FURUTA Mamoru, Takashi Hirao Title: Intense green cathodoluminescence from low-temperature-deposited ZnO film with fluted hexagonal cone nanostructures Journal: Appl. Phys. Express, Vol. 2, pp. 091601-091603 Year: 2009 Authors: Toshiyuki Kawaharamura, Shizuo Fujita Title: An approach of making single crystalline zinc oxide thin film with fine channel mist chemical vapor deposition method Journal: Physica Stat. Sol. (c), Vol. 5, pp. 3138-3140 Year: 2008 Authors: K. Ozga, KAWAHARAMURA Toshiyuki, A. AliUmar, M. Oyama, K. Nouneh, A Slezak, S. Fujita, M. Piasecki, A. H. Reshak, I. V. Kityk Title: Second order optical effects in Au nanoparticle-deposited ZnO nanocrystallite films Journal: Nanotechnology, Vol. 19, pp. 185709-1-185709-6 Year: 2008 Authors: Toshiyuki Kawaharamura, Hiroyuki Nishinaka, Jian-Guo Lu, Yudai Kamada, Yoshio Masuda, Shizuo Fujita Title: Mist CVD growth of ZnO-based thin films and nanostructures Journal: J. Korean Physical Society, Vol. 53, pp. 2976-2980 Year: 2008 Authors: Toshiyuki Kawaharamura, Hiroyuki Nishinaka, Shizuo Fujita Title: Growth of crystalline zinc oxide thin films by fine channel mist chemical vapor deposition Journal: Jpn. J. Appl. Phys., Vol. 47, pp. 4669-4675 Year: 2008 Authors: Hiroyuki Nishinaka, KAWAHARAMURA Toshiyuki, Shizuo Fujita Title: Low-temperature growth of ZnO thin films by linear source utrasonic spray chemical vapor deposition Journal: Japanese Journal of Applied Physics, Vol. 46, pp. 6811-6813 Year: 2007 Authors: Jian-Guo Lu, KAWAHARAMURA Toshiyuki, Hiroyuki Nishinaka, Yudai Kamada, Takayoshi Oshima, Shizuo Fujita Title: ZnO-based thin films synthesized by atmospheric pressure mist chemical vapor deposition Journal: Journal of Crystal Growth, Vol. 299, pp. 1-10 Year: 2007 Authors: Jian-Guo Lu, KAWAHARAMURA Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita Title: Roles of hydrogen and nitrogen in p-type doping of ZnO Journal: Chemical Physics Letters, Vol. 441, pp. 68-71 Year: 2007 Authors: Yudai Kamada, KAWAHARAMURA Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita Title: Fabrication of ZnO and ZnMgO thin films and UV photodetectors by mist chemical vapor deposition method Journal: Mater. Res. Soc. Symp. Proc., Vol. 957, p. K07-27 Year: 2007 Authors: Jian-Guo Lu, KAWAHARAMURA Toshiyuki, Hiroyuki Nishinaka, Yudai Kamada, Takayoshi Oshima, Shizuo Fujita Title: Carrier concentrationinduced band-gap shift in Al-doped Zn1-xMgxO thin films Journal: Applied Physics Letters, Vol. 89, pp. 262107_1-262107_3 Year: 2006 Authors: Yudai Kamada, KAWAHARAMURA Toshiyuki, Hiroyuki Nishinaka, Shizuo Fujita Title: Linear-source ultrasonic spray chemical vapor deposition method for fabrication of ZnMgO films and ultraviolet photodetectors Journal: Japanese Journal of Applied Physics, Vol. 45, pp. L857-L859 Year: 2006
Invited lectures	Development of 3rd generation mist CVD system, International Chemical Engineering Symposia (IChES) 2023, online, 2023 Reaction mechanism of mist CVD, International Chemical Engineering Symposia (IChES) 2023, online, 2023 Fabrication and characterization of the metal oxide thin film by mist CVD, the 2022 E-MRS Fall Meeting and Exhibit, online, 2022 Growth Mechanism of mist CVD, the 2022 Spring Meeting of the European Materials Research Society (E-MRS), a VIRTUAL Conference , 2022 Growth Mechanism of mist CVD, Materials Research Meeting 2019 (MRM 2019), Yokohama Symposia, Yokohama, Japan, 2019 Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow, The 76th JSAP Autumn Meeting, 2015, Nagoya Congress Center, Nagoya, 2015 Fabrication of Functional Thin Films and Electrical Devices by Mist CVD Equipping Highly Accurate Flow Control Technology under Atmospheric Pressure, AWAD, Jeju, Korea, 2015
Awards	The 37th JSAP Outstanding Paper Award, 2015, JSAP Young Scientist Award, JSAP, 2015 2014 JSAP Poster Award, The Japan Society of Applied Physics, 2014
Grants-in-Aid for Scientific Research from the Japanese government	Project title: Application technology development harnessing mist characteristics-The mist method for fabrication technology of electronic devices- Category: Grant-in-Aid for Young Scientists (B) Project number: 22760232 Project period: 2010-2011 Total budget amount: 4,290,000 yen Keywords: Project title: Basic behavior analysis of the Leidenfrost droplet toward the functional thin film fabrication on the three-dimensional object Category: Grant-in-Aid for Challenging Exploratory Research Project number: 26630395 Project period: 2014-2015 Total budget amount: 4,030,000 yen Keywords: Project title: Development of next generation mist CVD enabling atomic level control & development of oxide quantum devices Category: Grant-in-Aid for Young Scientists (A) Project number: 15H05421 Project period: 2015-2018 Total budget amount: 21,190,000 yen Keywords: Project title: Basic research on nanostructure control for the fabrication of ultra-wide bandgap oxide quantum devices by mist CVD Category: Grant-in-Aid for Scientific Research (B) Project number: 18H01873 Project period: 2018-2021 Total budget amount: 17,810,000 yen Keywords:

You can see the continuation of the table with a side swipe.

Social activities

Committee roles	Secretary of Program Committee, International Conference on Solid State Devices and Materials , 2013-2016

You can see the continuation of the table with a side swipe.

About KUT

Outline
Faculty Members
KUT's Approach to Education
Facilities
- Kami Campus
- Eikokuji Campus
Campus Map
- Kami Campus
- Eikokuji Campus
Access
- Kami Campus
- Eikokuji Campus
Contact
- Contact Us