Faculty Members

Professor
MAKINO, Hisao

Dr.Eng., University of Tsukuba, Japan, 1998

Year of birth: 1970
Gender: Male
Affiliation:

- School of Systems Engineering
- Electronic and Photonic Systems Engineering Course, Department of Engineering, Graduate School of Enginering
- Research Unit for Advanced Functional Materials and Devices, Center for Nanotechnology, Research Institute
Article from the "Cutting-edge Research and Social Contribution"：
https://www.kochi-tech.ac.jp/english/power/research/foundation_technology_towards_next-generation_electronics.html

Areas of specialization	Solid State Physics Physics of Semiconductor Thin Film Technology
Laboratory/research office	Functional thin film laboratory Development of the material with the new functionality as well as innovation of conventional electronic device technology are desired to settle the environment and energy problems and build the sustainable society. Ｔhe oxide semiconductor, which is expected as electronic material of the next generation, is also watched as the new functional materials, because the various physical properties are indicated, In this laboratory, we are controlling the physical properties of the oxide thin films and are aiming at improvement of the function and creation of a new functional devices.
Current research topics	Atomic Layer Deposition of ZnO Thin Films Properties of Wide Band Gap Semiconductors Application of Transparent Conductive Zinc Oxide Thin Films
Educational background	1998: Doctor, University of Tsukuba, Japan 1993: Bachelor, University of Tsukuba, Japan
Professional background	2014-: Associate Professor, System Engineering. Kochi University of Technology 2007-: Associate Professor, Research Institute, Kochi University of Technology 2005-2007: Assistant professor, Research Institute, Kochi University of Technology 2002-2003: Visiting Researcher, University of Bath 1999-2000: Visiting Researcher, The University of New South Wales 1998-2005: Research Associate, Institute for Materials Research, Tohoku University
Licenses
Academic societies	The Japan Society of Applied Physics The Physical Society of Japan The Japanese Society of Synchrotron Radiation Research

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Courses

* Courses provided in English are shown with (E) mark

Undergraduate school	Fundamentals of Semiconductor Physics Principles of Semiconductor Devices Experiments in System Engineering Graduation Thesis Fundamentals of Electronic Circuits Internship Career Seminar Experiments of Electronic and Photonic 2 Outline of Engineering
Graduate school	Advanced Seminar 1 Advanced Seminar 2 Seminar 1 Seminar 2 Individual Work for Graduate Advanced Semiconductor Physics

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Research activities

Research papers	Authors: J. Nomoto, T. Koida, I. Yamaguchi, H. Makino, Y. Kitanaka, T. Nakajima, T. Tsuchiya Title: Over 130 cm2/Vs Hall mobility of flexible transparent conductive In2O3 films by excimer-laser solid-phase crystallization Journal: NPG Asia Materials, Vol. 14, p. 76, Springer Nature Year: 2022 Authors: C. Barone, J. Gupta, R. M. Martin, I. Sydoryk, V. Craciun, J. Nomoto, H. Makino, T. Yamamoto, C. Martin Title: Robust stability of optical and electronic properties of gallium doped zinc oxide thin films to gamma ray irradiation Journal: Phys. Status Solidi B-Basic Res., pp. 2100469-1-2100469-5, WILEY Year: 2021 Authors: Velichko Rostislav, MAGARI Yusaku, Hisao Makino, Mamoru Furuta Title: Investigation of the effect of adding a moderate amount of hydrogen on the properties of tin oxide films deposited by DC magnetron sputtering Journal: Japanese Journal of Applied Physics, Vol. 60, pp. 055503-1-055503-6 Year: 2021 Authors: Dao Thi Hoa, Hisao Makino Title: Effects of substrate temperature on thermal stability of Al-doped ZnO thin films capped by AlOx Journal: Ceramics International, Elsevier Year: 2020 Authors: Dao Thi Hoa, Hisao Makino Title: Improving electrical conductivity and its thermal stability of Al-doped ZnO polycrystalline films using ultrathin Al film as a passivation layer Journal: Solar Energy Materials and Solar Cells, Vol. 203, p. 110159, Elsevier Year: 2019 Authors: Dao Thi Hoa, Hisao Makino Title: Enhancement in optoelectrical properties of polycrystalline ZnO thin films by Ar plasma Journal: Materials Science in Semiconductor Processing, Vol. 96, pp. 46-52, Elsevier Year: 2019 Authors: J. Nomoto, H. Makino, K. Inaba, S. Kobayashi, T. Yamamoto Title: Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO Journal: Journal of Applied Physics, Vol. 124, pp. 065304-1-065304-10, AIP Publishing Year: 2018 Authors: H. Song, H. Makino, J. Nomoto, N. Yamamoto, T. Yamamoto Title: Improved moisture stability of thin Ga-doped ZnO films by indium codoping Journal: Applied Surface Science, Vol. 457, pp. 241-246, Elsevier Year: 2018 Authors: Hisao Makino, Hiroyuki Shimizu Title: Influence of crystallographic polarity on the opto-electrical properties of polycrystalline ZnO thin films deposited by magnetron sputtering Journal: Applied Surface Science, Elsevier Year: 2018 Authors: H. Song, H. Makino, M. Kobata, J. Nomoto, K. Kobayashi, T. Yamamoto Title: Effects of the carrier concentration on polarity determination in Ga-doped ZnO films by hard x-ray photoelectron spectroscopy Journal: Applied Surface Science, Vol. 433, pp. 1148-1153, Elsevier Year: 2017 Authors: Junichi Nomoto, Katsuhiko Inaba, Shintaro Kobayashi, Takeshi Watanabe, Hisao Makino, Tetsuya Yamamoto Title: Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering Journal: Materials, Vol. 10, No. 8, p. 916, MDPI Year: 2017 Authors: Yusaku Magari, Hisao Makino, Mamoru Furuta Title: Carrier Generation Mechanism and Origin of Subgap States in Ar- and He-Plasma-Treated In–Ga–Zn–O Thin Films Journal: ECS Journal of Solid State Science nad Technology, Vol. 6, No. 8, pp. Q101-Q107 Year: 2017 Authors: Lukman Nulhakim, H. Makino, S. Kishimoro, J. Nomoto, T. Yamamoto Title: Enhancement of the hydrogen gas sensitivity by large distribution of c-axis preferred orientation in highly Ga-doped ZnO polycrystalline thin films Journal: Materials Science in Semiconductor Processing, Vol. 68, pp. 322-326, Elsevier Year: 2017 Authors: NOMOTO Junichi, INABA Katsuhiko , KOBAYASHI Shintaro, MAKINO Hisao, YAMAMOTO Tetsuya Title: Interface Layer to Tailor the Texture and Surface Morphology of Al-Doped ZnO Polycrystalline Films on Glass Substrates Journal: Journal of Crystal Growth, Vol. 468, pp. 645-649, ELSEVIER Year: 2017 Authors: C. Martin, K.H. Miller, H. Makino, D. Craciun, D. Simeone, V. Craciun Title: Optical properties of Ar ions irradiated nanocrystalline ZrC and ZrN thin films Journal: Journal of Nuclear Materials, Vol. 488, pp. 16-21 Year: 2017 Authors: V. Craciun, D. Craciun, G. Socol, S. Behdad, B. Boesl, C. Himcinschi, H. Makino, M. Socol, D. Simeone Title: Investigations of Ar ion irradiation effects on nanocrystalline SiC thin films Journal: Applied Surface Science, Vol. 374, pp. 339-345, Elsevier Year: 2016 Authors: NOMOTO Junichi, MAKINO Hisao, YAMAMOTO Tetsuya Title: High-Hall-Mobility Al-Doped ZnO Films Having Textured Polycrystalline Structure with a Well-Defined (0001) Orientation Journal: Nanoscale Research Letters, Vol. 11, pp. 320-1-320-8, Springer Open Year: 2016 Authors: NOMOTO Junichi, INABA Katsuhiko , OSADA Minoru, KOBAYASHI Shintaro , MAKINO Hisao, YAMAMOTO Tetsuya Title: Highly (0001)-Oriented Al-Doped ZnO Polycrystalline Films on Amorphous Glass Substrates Journal: Journal of Applied Physics, Vol. 120, pp. 125302-1-125302-11, AIP Publishing Year: 2016 Authors: Lukman Nulhakim, MAKINO Hisao Title: Control of microstructure by using self-buffer layer and its effects on properties of Ga-doped ZnO thin films deposited by radio frequency magnetron sputtering Journal: Thin Solid Films, Vol. 615, pp. 158-164, Elsevier Year: 2016 Authors: Lukman Nulhakim, MAKINO Hisao Title: Influence of polarity inversion on the electrical properties of Ga-doped ZnO thin films Journal: physica status solidi - Rapid Research Letters, Vol. 10, No. 7, pp. 535-539, Wiley Year: 2016 Authors: Lukman Nulhakim, MAKINO Hisao Title: Change of scattering mechanism and annealing out of defects on Ga-doped ZnO films deposited by radio-frequency magnetron sputtering Journal: Journal of Applied Physics, Vol. 119, p. 235302 Year: 2016 Authors: NOMOTO Junichi, MAKINO Hisao, YAMAMOTO Tetsuya Title: Correlation between Carrier Transport and Orientation Evolution of Polycrystalline Transparent Conductive Al-Doped ZnO Films Journal: Thin Solid Films, Vol. 620, pp. 2-9, ELSEVIER Year: 2016 Authors: NOMOTO Junichi, MAKINO Hisao, YAMAMOTO Tetsuya Title: Limiting factors of carrier concentration and transport of polycrystalline Ga-doped ZnO films deposited by ion plating with dc arc discharge Journal: Thin Solid Films, Vol. 601, pp. 13-17, ELSEVIER Year: 2016 Authors: Tomoaki Terasako, NOMOTO Junichi, MAKINO Hisao, Naoki Yamamoto, Sho Shirakata, YAMAMOTO Tetsuya Title: Effects of oxygen gas flow rates and Ga contents on structural properties of Ga-doped ZnO films prepared by ion-plating with a DC arc discharge Journal: Thin Solid Films, Vol. 596, pp. 24-28, Elsevier Year: 2015 Authors: NOMOTOJunichi, MAKINO Hisao, YAMAMOTO Tetsuya Title: Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk Journal: Journal of Applied Physics, Vol. 117, pp. 045304-1-045304-9, AIP Publishing Year: 2015 Authors: S. Kishimoto, S. Akamatsu, SONG Huaping, NOMOTOJunichi, MAKINO Hisao, YAMAMOTO Tetsuya Title: Carbon monoxide gas sensing properties of Ga-doped ZnO film grown by ion plating with DC arc discharge Journal: J. Sens. Sens. Syst., Vol. 3, pp. 331-334 Year: 2014 Authors: SONG Huaping, NOMOTOJunichi, MAKINO Hisao, YAMAMOTO Tetsuya Title: Highly moisture resistant Ga-doped ZnO films with textured surface for thin-film solar cells with indium codoping fabricated by ion plating with direct-current arc discharge Journal: Jpn. J. Appl. Phys., Vol. 53, pp. 05FJ04-1-05FJ04-5 Year: 2014 Authors: MAKINO Hisao, SONG Huaping, YAMAMOTO Tetsuya Title: Influences of oxygen gas flow rate on electrical properties of Ga-doped ZnO thin films deposited on glass and sapphire substrates Journal: Thin Solid Films, Vol. 559, pp. 78-82, Elsevier Year: 2014 Authors: T. Terasako, Y. Ogura, S. Fujimoto, SONG Huaping, MAKINO Hisao, M. Yagi, S. Shirakata, YAMAMOTO Tetsuya Title: Carrier transport and photoluminescence properties of Ga-doped ZnO films grown by ion-plating and by atmospheric-pressure CVD Journal: Thin Solid Films, Vol. 549, pp. 12-17, Elsevier Year: 2013 Authors: T. Terasako, SONG Huaping, MAKINO Hisao, S. Shirakata, YAMAMOTO Tetsuya Title: Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion plating with DC arc discharge Journal: Thin Solid Films, Vol. 528, pp. 19-25, Elsevier Year: 2013 Authors: YAMAMOTO Naoki, MAKINO Hisao, OSONE Satoshi, UJIHARA Akira, ITO Takahiro, HOKARI Hitoshi, MARUYAMA Taketo, YAMAMOTO Tetsuya Title: Development of Ga-doped ZnO Transparent Electrodes for Liquid Crystal Display Panels Journal: Thin Solid Films, Vol. 520, pp. 4131-4138 Year: 2012 Authors: YAMAMOTO Naoki, MAKINO Hisao, MORISAWA Kirihiko, YAMAMOTO Tetsuya Title: ZnO-Based Transparent Electrodes for LCDs Journal: ECS Transactions , Vol. 41, No. Issue 30, pp. 29-35 Year: 2012 Authors: YAMAMOTO Naoki, Makino Hisao, Yamamoto Tetsuya Title: Young’s Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films Journal: Advances in Materials Science and Engineering, Vol. 2011 Year: 2011 Authors: YAMAMOTO Naoki, Makino Hisao, Sato Yasushi, Yamamoto Tetsuya Title: Development of Ga–doped ZnO Transparent Electrodes as Alternatives for ITO Electrodes in Liquid Crystal Displays Journal: the SID 2011 digest of technical papers, pp. 1375-1378 Year: 2011 Authors: YAMAMOTO Naoki, Makino Hisao, Osone Satoshi, Ujihara Akira, Ito Takahiro, Hokari Hitoshi, Maruyama Taketo, Yamamoto Tetsuya Title: Development of Ga-doped ZnO Transparent Electrodes for Liquid Crystal Display Panels Journal: Thin Solid Films Year: 2011 Authors: YAMAMOTO Naoki, Makino Hisao, Sato Yasushi, Yamamoto Tetsuya Title: Controlled Formation of ZnO Fine-Pattern Transparent Electrodes by Wet-Chemical Etching Journal: ECS Transactions, Vol. 35, No. Issue: 8 , pp. 165-172 Year: 2011 Authors: H. Makino, T. Yamada, N. Yamamoto, T. Yamamoto Title: Effects of the O2 flow rate and post-deposition thermal annealing on the optical absorption spectra of Ga-doped ZnO films Journal: Thin Solid Films, Vol. 519, No. 5, pp. 1521-1524 Year: 2010 Authors: YAMAMOTO Naoki, Yamada Takahiro, Makino Hisao, Yamamoto Tetsuya Title: Heat Resistance of Ga-Doped ZnO Thin Films for Application as Transparent Electrodes in Liquid Crystal Displays Journal: J. Electrochem. Soc., Vol. 157, pp. J13-J20 Year: 2010 Authors: T. Yamada, H. Makino, N. Yamamoto, T. Yamamoto Title: Ingrain and grain boundary scattering effects on electron mobility of transparent conducting polycrystalline Ga-doped ZnO films Journal: J. Appl. Phys., Vol. 107, p. 123534 Year: 2010 Authors: H. Makino, N. Yamamoto, A. Miyake, T. Yamada, Y. Hirashima, H. Iwaoka, T. Itoh, H. Hokari, H. Aoki, T. Yamamoto Title: Influence of thermal annealing on electrical and optical properties of Ga-doped ZnO thin film Journal: Thin Solid Films, Vol. 518, No. 5, pp. 1386-1389 Year: 2009 Authors: H. Makino, S. Kishimoto, A. Miyake, T. Yamada, N. Yamamoto, T. Yamamoto Title: Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass, H. Makino, A. Miyake, T. Yamada, N. Yamamoto, T. Yamamoto, Journal: Thin Solid Films, Vol. 517, p. 3138 Year: 2009 Authors: H. Makino, S. Kishimoto, A. Miyake, T. Yamada, N. Yamamoto, T. Yamamoto Title: Effects of surface pretreatment on growth of ZnO on glass substrate Journal: phys. stat. sol. (a), Vol. 205, No. 8, pp. 1971-1974 Year: 2008 Authors: Tetsuya Yamamoto, Takahiro Yamada, Aki Miyake, Toshiyuki Morizane, Tooru Arimitsu, Hisao Makino, Naoki Yamamoto Title: Properties of Transparent Conductive Ga-Doped ZnO Films on Glass, PMMA and COP Substrates Journal: Invited Paper, IEICE TRANSACTIONS on Electronics, Vol. E91-C, No. 10, pp. 1547-1553 Year: 2008 Authors: YAMAMOTO Naoki, Yamada Takahiro, Miyake Aki, Makino Hisao, Kishimoto Seiichi, Yamamoto Tetsuya Title: Relationship between Residual stress and Crystallographic Structure in Ga-doped ZnO Film Journal: J. Electrochem. Soc., Vol. 155, No. 9, pp. J221-J225 Year: 2008 Authors: T. Yamada, A. Miyake, S. Kishimoto, H. Makino, N. Yamamoto, T. Yamamoto Title: Low resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc discharge Journal: Appl. Phys. Lett., Vol. 91, p. 051915 Year: 2007 Authors: Seiichi Kishimoto, Takahiro Yamada, Keigo Ikeda, Hisao Makino, Tetsuya Yamamoto Title: Effects of oxygen partial pressure on film growth and electrical properties of undoped ZnO films with thichness below 100nm Journal: Surface & Coatings Technology, Vol. 201, pp. 4000-4003 Year: 2006 Authors: H. Makino, T. Goto, T. Yao, G. A. Mousdis, G. C. Papavassiliou Title: Induced absorption and spontaneous emission due to biexciton in two-dimensional semiconductor (CH3C6H4CH2NH3)2PbBr4 single crysta Journal: J. Lumines, Vol. 112, No. 54-57 Year: 2005 Authors: Hisao Makino, J. J. Kim, P. P. Chen, M. W. Cho, Takafumi Yao Title: Making ferromagnetic semiconductors out of III-V nitride semiconductors Journal: Proc. SPIE Int. Soc. Opt. Eng., Vol. 5774, p. 11 Year: 2004 Authors: J. J. Kim, H. Makino, K. Kobayashi, Y. Takata, T. Yamamoto, T. Hanada, M. W. Cho, E. Ikenaga, M. Yabashi, D. Miwa, Y. Nishino, K. Tamasaku, T. Ishikawa, S. Shin, T. Yao Title: Hybridization of Cr 3d-N 2p-Ga 4s in the wide band gap diluted magnetic semiconductor Ga1-xCrxN Journal: Phys. Rev. B, Vol. 70, p. 161315(R) Year: 2004 Authors: N. Taghavinia, H. Makino, T. Yao Title: Enhancement of Mn luminescence in ZnS:Mn multi-quantum-well structures Journal: Appl. Phys. Lett., Vol. 83, p. 4616 Year: 2003 Authors: K. Godo, H. Makino, M. W. Cho, J. H. Chang, Y. Yamazaki, T. Yao, M. Y. Shen, T. Goto Title: Composition dependence of the energy gap of Zn1-x-yMgxBeySe quaternary alloys nearly lattice matched to GaAs Journal: Appl. Phys. Lett., Vol. 79, pp. 4168-4170 Year: 2001 Authors: H. Makino, H. Sasaki, J.H. Chang, T. Yao Title: Raman investigation of Zn1-x-yMgxSe1-yTey quaternary alloys grown by molecular beam epitaxy Journal: J. Cryst. Growth, Vol. 214/215, pp. 359-363 Year: 2000 Authors: H. Makino, I. H. Inoue, M. J. Rozenberg, I. Hase, Y. Aiura, S. Onari Title: Bandwidth control in a perovskite-type 3d1-correlated metal Ca1-xSrxVO3. II. Optical spectroscopy Journal: Phys. Rev. B, Vol. 58, pp. 4384-4393 Year: 1998
Invited lectures	Laboratory hard X-ray photoemission spectroscopy of polycrystalline ZnO thin films, The 13th Korean Symposium on Surface Analysis, Koreana Hotel, Seoul, Korea, 2018
Grants-in-Aid for Scientific Research from the Japanese government	Project title: Control of crystal orientation and acceptor doping properties on polycrystalline zinc oxide thin films Category: Grant-in-Aid for Scientific Research (C) Project number: 23560026 Project period: 2011-2013 Total budget amount: 5,330,000 yen Keywords: Project title: Polarity control and point defects in low temperature grown polycrystalline zinc oxide thin films Category: Grant-in-Aid for Scientific Research (C) Project number: 17K06356 Project period: 2017-2019 Total budget amount: 4,810,000 yen Keywords: Project title: Control of defects in polycrystalline ZnO thin films for chemical sensor Category: Grant-in-Aid for Scientific Research (C) Project number: 20K04582 Project period: 2020-2022 Total budget amount: 4,420,000 yen Keywords:

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