Faculty Members


Associate Professor

Dr.Eng., University of Tsukuba, Japan, 1998

  • Year of birth: 1970
  • Gender: Male
  • Affiliation:
    - School of Systems Engineering
    - Electronic and Photonic Systems Engineering Course, Department of Engineering, Graduate School of Enginering
    - Research Institute
    - Center for Nanotechnology, Research Institute
    - Materials Design Center, Research Institute
Areas of specialization Solid State Physics
Physics of Semiconductor
Thin Film Technology
Laboratory/research office Functional Thin Film Laboratory
Our lab conducts research for the development of materials with new functionality and for innovation in conventional electronic device technology, which is needed to solve current environmental and energy problems and develop a sustainable society. The oxide semiconductor, which is expected to be the foundation next generation electronic material, is considered a new functional material, because of its various useful physical properties. In this laboratory, we are controlling the physical properties of the oxide thin films and are aiming at improvement of the function and creation of new functional devices.
Current reseach topics Atomic Layer Deposition of ZnO Thin Films Properties of Wide Band Gap Semiconductors Application of Transparent Conductive Zinc Oxide Thin Films
Educational background 1998: Doctor, University of Tsukuba, Japan
1993: Bachelor, University of Tsukuba, Japan
Professional background 2014-: Associate Professor, System Engineering. Kochi University of Technology
2007-: Associate Professor, Research Institute, Kochi University of Technology
2005-2007: Assistant professor, Research Institute, Kochi University of Technology
2002-2003: Visiting Researcher, University of Bath
1999-2000: Visiting Researcher, The University of New South Wales
1998-2005: Research Associate, Institute for Materials Research, Tohoku University
Academic societies The Japan Society of Applied Physics
The Physical Society of Japan
The Japanese Society of Synchrotron Radiation Research

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* Courses provided in English are shown with (E) mark

Undergraduate school
  • Fundamentals of Semiconductor Physics
  • Principles of Semiconductor Devices
  • Experiments in System Engineering
  • Graduation Thesis
  • Fundamentals of Electronic Circuits
Graduate school
  • Advanced Seminar 1
  • Advanced Seminar 2
  • Seminar 1
  • Seminar 2
  • Individual Work for Graduate
  • Advanced Semiconductor Physics

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Research activities

Research papers
  1. Authors: H. Song, H. Makino, M. Kobata, J. Nomoto, K. Kobayashi, T. Yamamoto
    Title: Effects of the carrier concentration on polarity determination in Ga-doped ZnO films by hard x-ray photoelectron spectroscopy
    Journal: Applied Surface Science, Vol. 433, pp. 1148-1153, Elsevier
    Year: 2017
  2. Authors: Junichi Nomoto, Katsuhiko Inaba, Shintaro Kobayashi, Takeshi Watanabe, Hisao Makino, Tetsuya Yamamoto
    Title: Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering
    Journal: Materials, Vol. 10, No. 8, p. 916, MDPI
    Year: 2017
  3. Authors: Yusaku Magari, Hisao Makino, Mamoru Furuta
    Title: Carrier Generation Mechanism and Origin of Subgap States in Ar- and He-Plasma-Treated In–Ga–Zn–O Thin Films
    Journal: ECS Journal of Solid State Science nad Technology, Vol. 6, No. 8, pp. Q101-Q107
    Year: 2017
  4. Authors: Lukman Nulhakim, H. Makino, S. Kishimoro, J. Nomoto, T. Yamamoto
    Title: Enhancement of the hydrogen gas sensitivity by large distribution of c-axis preferred orientation in highly Ga-doped ZnO polycrystalline thin films
    Journal: Materials Science in Semiconductor Processing, Vol. 68, pp. 322-326, Elsevier
    Year: 2017
  5. Authors: NOMOTO Junichi, INABA Katsuhiko , KOBAYASHI Shintaro, MAKINO Hisao, YAMAMOTO Tetsuya
    Title: Interface Layer to Tailor the Texture and Surface Morphology of Al-Doped ZnO Polycrystalline Films on Glass Substrates
    Journal: Journal of Crystal Growth, Vol. 468, pp. 645-649, ELSEVIER
    Year: 2017
  6. Authors: C. Martin, K.H. Miller, H. Makino, D. Craciun, D. Simeone, V. Craciun
    Title: Optical properties of Ar ions irradiated nanocrystalline ZrC and ZrN thin films
    Journal: Journal of Nuclear Materials, Vol. 488, pp. 16-21
    Year: 2017
  7. Authors: V. Craciun, D. Craciun, G. Socol, S. Behdad, B. Boesl, C. Himcinschi, H. Makino, M. Socol, D. Simeone
    Title: Investigations of Ar ion irradiation effects on nanocrystalline SiC thin films
    Journal: Applied Surface Science, Vol. 374, pp. 339-345, Elsevier
    Year: 2016
  8. Authors: Lukman Nulhakim, MAKINO Hisao
    Title: Influence of polarity inversion on the electrical properties of Ga-doped ZnO thin films
    Journal: physica status solidi - Rapid Research Letters, Vol. 10, No. 7, pp. 535-539, Wiley
    Year: 2016
  9. Authors: NOMOTO Junichi, INABA Katsuhiko , OSADA Minoru, KOBAYASHI Shintaro , MAKINO Hisao, YAMAMOTO Tetsuya
    Title: Highly (0001)-Oriented Al-Doped ZnO Polycrystalline Films on Amorphous Glass Substrates
    Journal: Journal of Applied Physics, Vol. 120, pp. 125302-1-125302-11, AIP Publishing
    Year: 2016
  10. Authors: Lukman Nulhakim, MAKINO Hisao
    Title: Control of microstructure by using self-buffer layer and its effects on properties of Ga-doped ZnO thin films deposited by radio frequency magnetron sputtering
    Journal: Thin Solid Films, Vol. 615, pp. 158-164, Elsevier
    Year: 2016
  11. Authors: Lukman Nulhakim, MAKINO Hisao
    Title: Change of scattering mechanism and annealing out of defects on Ga-doped ZnO films deposited by radio-frequency magnetron sputtering
    Journal: Journal of Applied Physics, Vol. 119, p. 235302
    Year: 2016
  12. Authors: NOMOTO Junichi, MAKINO Hisao, YAMAMOTO Tetsuya
    Title: Correlation between Carrier Transport and Orientation Evolution of Polycrystalline Transparent Conductive Al-Doped ZnO Films
    Journal: Thin Solid Films, Vol. 620, pp. 2-9, ELSEVIER
    Year: 2016
  13. Authors: NOMOTO Junichi, MAKINO Hisao, YAMAMOTO Tetsuya
    Title: High-Hall-Mobility Al-Doped ZnO Films Having Textured Polycrystalline Structure with a Well-Defined (0001) Orientation
    Journal: Nanoscale Research Letters, Vol. 11, pp. 320-1-320-8, Springer Open
    Year: 2016
  14. Authors: NOMOTO Junichi, MAKINO Hisao, YAMAMOTO Tetsuya
    Title: Limiting factors of carrier concentration and transport of polycrystalline Ga-doped ZnO films deposited by ion plating with dc arc discharge
    Journal: Thin Solid Films, Vol. 601, pp. 13-17, ELSEVIER
    Year: 2016
  15. Authors: Tomoaki Terasako, NOMOTO Junichi, MAKINO Hisao, Naoki Yamamoto, Sho Shirakata, YAMAMOTO Tetsuya
    Title: Effects of oxygen gas flow rates and Ga contents on structural properties of Ga-doped ZnO films prepared by ion-plating with a DC arc discharge
    Journal: Thin Solid Films, Vol. 596, pp. 24-28, Elsevier
    Year: 2015
  16. Authors: NOMOTOJunichi, MAKINO Hisao, YAMAMOTO Tetsuya
    Title: Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk
    Journal: Journal of Applied Physics, Vol. 117, pp. 045304-1-045304-9, AIP Publishing
    Year: 2015
  17. Authors: S. Kishimoto, S. Akamatsu, SONG Huaping, NOMOTOJunichi, MAKINO Hisao, YAMAMOTO Tetsuya
    Title: Carbon monoxide gas sensing properties of Ga-doped ZnO film grown by ion plating with DC arc discharge
    Journal: J. Sens. Sens. Syst., Vol. 3, pp. 331-334
    Year: 2014
  18. Authors: MAKINO Hisao, SONG Huaping, YAMAMOTO Tetsuya
    Title: Influences of oxygen gas flow rate on electrical properties of Ga-doped ZnO thin films deposited on glass and sapphire substrates
    Journal: Thin Solid Films, Vol. 559, pp. 78-82, Elsevier
    Year: 2014
  19. Authors: SONG Huaping, NOMOTOJunichi, MAKINO Hisao, YAMAMOTO Tetsuya
    Title: Highly moisture resistant Ga-doped ZnO films with textured surface for thin-film solar cells with indium codoping fabricated by ion plating with direct-current arc discharge
    Journal: Jpn. J. Appl. Phys., Vol. 53, pp. 05FJ04-1-05FJ04-5
    Year: 2014
  20. Authors: T. Terasako, Y. Ogura, S. Fujimoto, SONG Huaping, MAKINO Hisao, M. Yagi, S. Shirakata, YAMAMOTO Tetsuya
    Title: Carrier transport and photoluminescence properties of Ga-doped ZnO films grown by ion-plating and by atmospheric-pressure CVD
    Journal: Thin Solid Films, Vol. 549, pp. 12-17, Elsevier
    Year: 2013
  21. Authors: T. Terasako, SONG Huaping, MAKINO Hisao, S. Shirakata, YAMAMOTO Tetsuya
    Title: Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion plating with DC arc discharge
    Journal: Thin Solid Films, Vol. 528, pp. 19-25, Elsevier
    Year: 2013
  22. Authors: YAMAMOTO Naoki, MAKINO Hisao, MORISAWA Kirihiko, YAMAMOTO Tetsuya
    Title: ZnO-Based Transparent Electrodes for LCDs
    Journal: ECS Transactions , Vol. 41, No. Issue 30, pp. 29-35
    Year: 2012
  23. Authors: YAMAMOTO Naoki, MAKINO Hisao, OSONE Satoshi, UJIHARA Akira, ITO Takahiro, HOKARI Hitoshi, MARUYAMA Taketo, YAMAMOTO Tetsuya
    Title: Development of Ga-doped ZnO Transparent Electrodes for Liquid Crystal Display Panels
    Journal: Thin Solid Films, Vol. 520, pp. 4131-4138
    Year: 2012
  24. Authors: YAMAMOTO Naoki, Makino Hisao, Yamamoto Tetsuya
    Title: Young’s Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films
    Journal: Advances in Materials Science and Engineering, Vol. 2011
    Year: 2011
  25. Authors: YAMAMOTO Naoki, Makino Hisao, Sato Yasushi, Yamamoto Tetsuya
    Title: Development of Ga–doped ZnO Transparent Electrodes as Alternatives for ITO Electrodes in Liquid Crystal Displays
    Journal: the SID 2011 digest of technical papers, pp. 1375-1378
    Year: 2011
  26. Authors: YAMAMOTO Naoki, Makino Hisao, Osone Satoshi, Ujihara Akira, Ito Takahiro, Hokari Hitoshi, Maruyama Taketo, Yamamoto Tetsuya
    Title: Development of Ga-doped ZnO Transparent Electrodes for Liquid Crystal Display Panels
    Journal: Thin Solid Films
    Year: 2011
  27. Authors: YAMAMOTO Naoki, Makino Hisao, Sato Yasushi, Yamamoto Tetsuya
    Title: Controlled Formation of ZnO Fine-Pattern Transparent Electrodes by Wet-Chemical Etching
    Journal: ECS Transactions, Vol. 35, No. Issue: 8 , pp. 165-172
    Year: 2011
  28. Authors: H. Makino, T. Yamada, N. Yamamoto, T. Yamamoto
    Title: Effects of the O2 flow rate and post-deposition thermal annealing on the optical absorption spectra of Ga-doped ZnO films
    Journal: Thin Solid Films, Vol. 519, No. 5, pp. 1521-1524
    Year: 2010
  29. Authors: YAMAMOTO Naoki, Yamada Takahiro, Makino Hisao, Yamamoto Tetsuya
    Title: Heat Resistance of Ga-Doped ZnO Thin Films for Application as Transparent Electrodes in Liquid Crystal Displays
    Journal: J. Electrochem. Soc., Vol. 157, pp. J13-J20
    Year: 2010
  30. Authors: T. Yamada, H. Makino, N. Yamamoto, T. Yamamoto
    Title: Ingrain and grain boundary scattering effects on electron mobility of transparent conducting polycrystalline Ga-doped ZnO films
    Journal: J. Appl. Phys., Vol. 107, p. 123534
    Year: 2010
  31. Authors: H. Makino, N. Yamamoto, A. Miyake, T. Yamada, Y. Hirashima, H. Iwaoka, T. Itoh, H. Hokari, H. Aoki, T. Yamamoto
    Title: Influence of thermal annealing on electrical and optical properties of Ga-doped ZnO thin film
    Journal: Thin Solid Films, Vol. 518, No. 5, pp. 1386-1389
    Year: 2009
  32. Authors: H. Makino, S. Kishimoto, A. Miyake, T. Yamada, N. Yamamoto, T. Yamamoto
    Title: Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass, H. Makino, A. Miyake, T. Yamada, N. Yamamoto, T. Yamamoto,
    Journal: Thin Solid Films, Vol. 517, p. 3138
    Year: 2009
  33. Authors: H. Makino, S. Kishimoto, A. Miyake, T. Yamada, N. Yamamoto, T. Yamamoto
    Title: Effects of surface pretreatment on growth of ZnO on glass substrate
    Journal: phys. stat. sol. (a), Vol. 205, No. 8, pp. 1971-1974
    Year: 2008
  34. Authors: Tetsuya Yamamoto, Takahiro Yamada, Aki Miyake, Toshiyuki Morizane, Tooru Arimitsu, Hisao Makino, Naoki Yamamoto
    Title: Properties of Transparent Conductive Ga-Doped ZnO Films on Glass, PMMA and COP Substrates
    Journal: Invited Paper, IEICE TRANSACTIONS on Electronics, Vol. E91-C, No. 10, pp. 1547-1553
    Year: 2008
  35. Authors: YAMAMOTO Naoki, Yamada Takahiro, Miyake Aki, Makino Hisao, Kishimoto Seiichi, Yamamoto Tetsuya
    Title: Relationship between Residual stress and Crystallographic Structure in Ga-doped ZnO Film
    Journal: J. Electrochem. Soc., Vol. 155, No. 9, pp. J221-J225
    Year: 2008
  36. Authors: T. Yamada, A. Miyake, S. Kishimoto, H. Makino, N. Yamamoto, T. Yamamoto
    Title: Low resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc discharge
    Journal: Appl. Phys. Lett., Vol. 91, p. 051915
    Year: 2007
  37. Authors: Seiichi Kishimoto, Takahiro Yamada, Keigo Ikeda, Hisao Makino, Tetsuya Yamamoto
    Title: Effects of oxygen partial pressure on film growth and electrical properties of undoped ZnO films with thichness below 100nm
    Journal: Surface & Coatings Technology, Vol. 201, pp. 4000-4003
    Year: 2006
  38. Authors: H. Makino, T. Goto, T. Yao, G. A. Mousdis, G. C. Papavassiliou
    Title: Induced absorption and spontaneous emission due to biexciton in two-dimensional semiconductor (CH3C6H4CH2NH3)2PbBr4 single crysta
    Journal: J. Lumines, Vol. 112, No. 54-57
    Year: 2005
  39. Authors: Hisao Makino, J. J. Kim, P. P. Chen, M. W. Cho, Takafumi Yao
    Title: Making ferromagnetic semiconductors out of III-V nitride semiconductors
    Journal: Proc. SPIE Int. Soc. Opt. Eng., Vol. 5774, p. 11
    Year: 2004
  40. Authors: J. J. Kim, H. Makino, K. Kobayashi, Y. Takata, T. Yamamoto, T. Hanada, M. W. Cho, E. Ikenaga, M. Yabashi, D. Miwa, Y. Nishino, K. Tamasaku, T. Ishikawa, S. Shin, T. Yao
    Title: Hybridization of Cr 3d-N 2p-Ga 4s in the wide band gap diluted magnetic semiconductor Ga1-xCrxN
    Journal: Phys. Rev. B, Vol. 70, p. 161315(R)
    Year: 2004
  41. Authors: N. Taghavinia, H. Makino, T. Yao
    Title: Enhancement of Mn luminescence in ZnS:Mn multi-quantum-well structures
    Journal: Appl. Phys. Lett., Vol. 83, p. 4616
    Year: 2003
  42. Authors: K. Godo, H. Makino, M. W. Cho, J. H. Chang, Y. Yamazaki, T. Yao, M. Y. Shen, T. Goto
    Title: Composition dependence of the energy gap of Zn1-x-yMgxBeySe quaternary alloys nearly lattice matched to GaAs
    Journal: Appl. Phys. Lett., Vol. 79, pp. 4168-4170
    Year: 2001
  43. Authors: H. Makino, H. Sasaki, J.H. Chang, T. Yao
    Title: Raman investigation of Zn1-x-yMgxSe1-yTey quaternary alloys grown by molecular beam epitaxy
    Journal: J. Cryst. Growth, Vol. 214/215, pp. 359-363
    Year: 2000
  44. Authors: H. Makino, I. H. Inoue, M. J. Rozenberg, I. Hase, Y. Aiura, S. Onari
    Title: Bandwidth control in a perovskite-type 3d1-correlated metal Ca1-xSrxVO3. II. Optical spectroscopy
    Journal: Phys. Rev. B, Vol. 58, pp. 4384-4393
    Year: 1998
Grants-in-Aid for Scientific Research from the Japanese government
  1. Project title: Polarity control and point defects in low temperature grown polycrystalline zinc oxide thin films
    Category: Grant-in-Aid for Scientific Research(C)
    Project number: 17K06356
    Project period: 2017/04-2020/03
    Total budget amount: 4,810,000 yen
  2. Project title: Control of crystal orientation and acceptor doping properties on polycrystalline zinc oxide thin films
    Category: Grant-in-Aid for Scientific Research(C)
    Project number: 23560026
    Project period: 2011/04-2014/03
    Total budget amount: 5,330,000 yen

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Social activities

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