教員情報詳細

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牧野 久雄Hisao Makino

  • 1970年生まれ 男性
  • 職位: 教授
  • 所属:
  • システム工学群
    大学院工学研究科 基盤工学専攻 電子・光システム工学コース
    総合研究所
    総合研究所 ナノテクノロジー研究センター
    総合研究所 マテリアルデザインセンター

教員略歴

学位 博士 (工学)
学歴 筑波大学大学院博士課程工学研究科物理工学専攻 修了(1998)
筑波大学第三学群基礎工学類物理工学主専攻 卒業(1993)
職歴 高知工科大学 システム工学群准教授(2014~)
高知工科大学 総合研究所准教授(2007~)
高知工科大学 総合研究所助教授(2005~2007)
バース大学客員研究員(2002~2003)
ニューサウスウェールズ大学客員研究員(1999~2000)
東北大学金属材料研究所助手(1998~2005)
資格
専門分野 固体物理学
半導体物理工学
薄膜工学
研究室 名称 機能性薄膜工学研究室
詳細 資源・環境・エネルギー問題を解決し持続可能な社会を構築するために、従来の電子デバイス技術の革新とともに、新しい機能性を有する材料の開発が求められています。次世代の電子材料として期待される酸化物半導体は、従来の半導体にはない多様な物性を示すことから、新しい機能を示す材料としても注目されています。本研究室では、先端デバイスに欠かせない機能性酸化物薄膜の物性を制御し、機能の向上や新機能デバイスの創出を目指しています。
所属学会 応用物理学会
日本物理学会
日本放射光学会

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本年度担当講義

学部・学群 半導体工学基礎 / 半導体デバイス / システム工学実験 / 卒業研究 / 電子回路基礎
大学院 特別セミナー1 / 特別セミナー2 / セミナー1 / セミナー2 / 特別研究 / 半導体工学特論

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研究シーズ

相談可能な領域 薄膜成長技術
薄膜評価技術
半導体光物性
現在の研究 酸化亜鉛薄膜の原子層成長

ワイドギャップ半導体の物性研究

ZnO系透明導電膜の応用に関する研究

メッセージ

研究業績

代表的な研究論文

タイトル 著者 発表誌 発表年
Enhancement in optoelectrical properties of polycrystalline ZnO thin films by Ar plasma Dao Thi Hoa,Hisao Makino Materials Science in Semiconductor Processing,Vol.96,pp.46-52 2019
Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO J. Nomoto,H. Makino,K. Inaba,S. Kobayashi,T. Yamamoto Journal of Applied Physics,Vol.124,pp.065304-1-065304-10 2018
Improved moisture stability of thin Ga-doped ZnO films by indium codoping H. Song,H. Makino,J. Nomoto,N. Yamamoto,T. Yamamoto Applied Surface Science,Vol.457,pp.241-246 2018
Influence of crystallographic polarity on the opto-electrical properties of polycrystalline ZnO thin films deposited by magnetron sputtering Hisao Makino,Hiroyuki Shimizu Applied Surface Science 2018
Effects of the carrier concentration on polarity determination in Ga-doped ZnO films by hard x-ray photoelectron spectroscopy H. Song,H. Makino,M. Kobata,J. Nomoto,K. Kobayashi,T. Yamamoto Applied Surface Science,Vol.433,pp.1148-1153 2017
Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering Junichi Nomoto,Katsuhiko Inaba,Shintaro Kobayashi,Takeshi Watanabe,Hisao Makino,Tetsuya Yamamoto Materials,Vol.10,No.8,pp.916 2017
Enhancement of the hydrogen gas sensitivity by large distribution of c-axis preferred orientation in highly Ga-doped ZnO polycrystalline thin films Lukman Nulhakim,H. Makino,S. Kishimoro,J. Nomoto,T. Yamamoto Materials Science in Semiconductor Processing,Vol.68,pp.322-326 2017
Carrier Generation Mechanism and Origin of Subgap States in Ar- and He-Plasma-Treated In–Ga–Zn–O Thin Films Yusaku Magari,Hisao Makino,Mamoru Furuta ECS Journal of Solid State Science nad Technology,Vol.6,No.8,pp.Q101-Q107 2017
Interface Layer to Tailor the Texture and Surface Morphology of Al-Doped ZnO Polycrystalline Films on Glass Substrates NOMOTO Junichi,INABA Katsuhiko,KOBAYASHI Shintaro,MAKINO Hisao,YAMAMOTO Tetsuya Journal of Crystal Growth,Vol.468,pp.645-649 2017
Optical properties of Ar ions irradiated nanocrystalline ZrC and ZrN thin films C. Martin,K.H. Miller,H. Makino,D. Craciun,D. Simeone,V. Craciun Journal of Nuclear Materials,Vol.488,pp.16-21 2017
Highly (0001)-Oriented Al-Doped ZnO Polycrystalline Films on Amorphous Glass Substrates NOMOTO Junichi,INABA Katsuhiko,OSADA Minoru,KOBAYASHI Shintaro,MAKINO Hisao,YAMAMOTO Tetsuya Journal of Applied Physics,Vol.120,pp.125302-1-125302-11 2016
Investigations of Ar ion irradiation effects on nanocrystalline SiC thin films V. Craciun,D. Craciun,G. Socol,S. Behdad,B. Boesl,C. Himcinschi,H. Makino,M. Socol,D. Simeone Applied Surface Science,Vol.374,pp.339-345 2016
Correlation between Carrier Transport and Orientation Evolution of Polycrystalline Transparent Conductive Al-Doped ZnO Films NOMOTO Junichi,MAKINO Hisao,YAMAMOTO Tetsuya Thin Solid Films,Vol.620,pp.2-9 2016
Control of microstructure by using self-buffer layer and its effects on properties of Ga-doped ZnO thin films deposited by radio frequency magnetron sputtering Lukman Nulhakim,MAKINO Hisao Thin Solid Films,Vol.615,pp.158-164 2016
Influence of polarity inversion on the electrical properties of Ga-doped ZnO thin films Lukman Nulhakim,MAKINO Hisao physica status solidi - Rapid Research Letters,Vol.10,No.7,pp.535-539 2016
High-Hall-Mobility Al-Doped ZnO Films Having Textured Polycrystalline Structure with a Well-Defined (0001) Orientation NOMOTO Junichi,MAKINO Hisao,YAMAMOTO Tetsuya Nanoscale Research Letters,Vol.11,pp.320-1-320-8 2016
Change of scattering mechanism and annealing out of defects on Ga-doped ZnO films deposited by radio-frequency magnetron sputtering Lukman Nulhakim,MAKINO Hisao Journal of Applied Physics,Vol.119,pp.235302 2016
Limiting factors of carrier concentration and transport of polycrystalline Ga-doped ZnO films deposited by ion plating with dc arc discharge NOMOTO Junichi,MAKINO Hisao,YAMAMOTO Tetsuya Thin Solid Films,Vol.601,pp.13-17 2016
Effects of oxygen gas flow rates and Ga contents on structural properties of Ga-doped ZnO films prepared by ion-plating with a DC arc discharge Tomoaki Terasako,NOMOTO Junichi,MAKINO Hisao,Naoki Yamamoto,Sho Shirakata,YAMAMOTO Tetsuya Thin Solid Films,Vol.596,pp.24-28 2015
Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk NOMOTO,Junichi,MAKINO, Hisao,YAMAMOTO, Tetsuya Journal of Applied Physics,Vol.117,pp.045304-1-045304-9 2015
Carbon monoxide gas sensing properties of Ga-doped ZnO film grown by ion plating with DC arc discharge S. Kishimoto,S. Akamatsu,SONG, Huaping,NOMOTO,Junichi,MAKINO, Hisao,YAMAMOTO, Tetsuya J. Sens. Sens. Syst.,Vol.3,pp.331-334 2014
Highly moisture resistant Ga-doped ZnO films with textured surface for thin-film solar cells with indium codoping fabricated by ion plating with direct-current arc discharge SONG, Huaping,NOMOTO,Junichi,MAKINO, Hisao,YAMAMOTO, Tetsuya Jpn. J. Appl. Phys.,Vol.53,pp.05FJ04-1-05FJ04-5 2014
Influences of oxygen gas flow rate on electrical properties of Ga-doped ZnO thin films deposited on glass and sapphire substrates MAKINO, Hisao,SONG, Huaping,YAMAMOTO, Tetsuya Thin Solid Films,Vol.559,pp.78-82 2014
Carrier transport and photoluminescence properties of Ga-doped ZnO films grown by ion-plating and by atmospheric-pressure CVD T. Terasako,Y. Ogura,S. Fujimoto,SONG, Huaping,MAKINO, Hisao,M. Yagi,S. Shirakata,YAMAMOTO, Tetsuya Thin Solid Films,Vol.549,pp.12-17 2013
Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion plating with DC arc discharge T. Terasako,SONG, Huaping,MAKINO, Hisao,S. Shirakata,YAMAMOTO, Tetsuya Thin Solid Films,Vol.528,pp.19-25 2013
Development of Ga-doped ZnO Transparent Electrodes for Liquid Crystal Display Panels YAMAMOTO, Naoki,MAKINO, Hisao,OSONE Satoshi,UJIHARA Akira,ITO Takahiro,HOKARI Hitoshi,MARUYAMA Taketo,YAMAMOTO, Tetsuya Thin Solid Films,Vol.520,pp.4131-4138 2012
ZnO-Based Transparent Electrodes for LCDs YAMAMOTO, Naoki,MAKINO, Hisao,MORISAWA Kirihiko,YAMAMOTO, Tetsuya ECS Transactions,Vol.41,No.Issue 30,pp.29-35 2012
Young’s Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films YAMAMOTO, Naoki,Makino, Hisao,Yamamoto, Tetsuya Advances in Materials Science and Engineering,Vol.2011 2011
Controlled Formation of ZnO Fine-Pattern Transparent Electrodes by Wet-Chemical Etching YAMAMOTO, Naoki,Makino, Hisao,Sato, Yasushi,Yamamoto, Tetsuya ECS Transactions,Vol.35,No.Issue: 8 ,pp.165-172 2011
Development of Ga-doped ZnO Transparent Electrodes for Liquid Crystal Display Panels YAMAMOTO, Naoki,Makino, Hisao,Osone, Satoshi,Ujihara, Akira,Ito, Takahiro,Hokari, Hitoshi,Maruyama, Taketo,Yamamoto, Tetsuya Thin Solid Films 2011
Development of Ga–doped ZnO Transparent Electrodes as Alternatives for ITO Electrodes in Liquid Crystal Displays YAMAMOTO, Naoki,Makino, Hisao,Sato, Yasushi,Yamamoto Tetsuya the SID 2011 digest of technical papers,pp.1375-1378 2011
Effects of the O2 flow rate and post-deposition thermal annealing on the optical absorption spectra of Ga-doped ZnO films H. Makino,T. Yamada,N. Yamamoto,T. Yamamoto Thin Solid Films,Vol.519,No.5,pp.1521-1524 2010
Ingrain and grain boundary scattering effects on electron mobility of transparent conducting polycrystalline Ga-doped ZnO films T. Yamada,H. Makino,,N. Yamamoto,T. Yamamoto J. Appl. Phys.,Vol.107,pp.123534 2010
Heat Resistance of Ga-Doped ZnO Thin Films for Application as Transparent Electrodes in Liquid Crystal Displays YAMAMOTO, Naoki,Yamada Takahiro,Makino, Hisao,Yamamoto, Tetsuya J. Electrochem. Soc.,Vol.157,pp.J13-J20 2010
Influence of thermal annealing on electrical and optical properties of Ga-doped ZnO thin film H. Makino,N. Yamamoto,A. Miyake,T. Yamada,Y. Hirashima,H. Iwaoka,T. Itoh,H. Hokari,H. Aoki,T. Yamamoto Thin Solid Films,Vol.518,No.5,pp.1386-1389 2009
Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass, H. Makino, A. Miyake, T. Yamada, N. Yamamoto, T. Yamamoto, H. Makino,S. Kishimoto,A. Miyake,T. Yamada,N. Yamamoto,T. Yamamoto Thin Solid Films,Vol.517,pp.3138 2009
Effects of surface pretreatment on growth of ZnO on glass substrate H. Makino,S. Kishimoto,A. Miyake,T. Yamada,N. Yamamoto,T. Yamamoto phys. stat. sol. (a),Vol.205,No.8,pp.1971-1974 2008
Relationship between Residual stress and Crystallographic Structure in Ga-doped ZnO Film YAMAMOTO, Naoki,Yamada, Takahiro,Miyake, Aki,Makino, Hisao,Kishimoto, Seiichi,Yamamoto, Tetsuya J. Electrochem. Soc.,Vol.155,No.9,pp.J221-J225 2008
Properties of Transparent Conductive Ga-Doped ZnO Films on Glass, PMMA and COP Substrates Tetsuya Yamamoto,Takahiro Yamada,Aki Miyake,Toshiyuki Morizane,Tooru Arimitsu,Hisao Makino,Naoki Yamamoto Invited Paper, IEICE TRANSACTIONS on Electronics,Vol.E91-C,No.10,pp.1547-1553 2008
Low resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc discharge T. Yamada,A. Miyake,S. Kishimoto,H. Makino,N. Yamamoto,T. Yamamoto Appl. Phys. Lett.,Vol.91,pp.051915 2007
Effects of oxygen partial pressure on film growth and electrical properties of undoped ZnO films with thichness below 100nm Seiichi Kishimoto,Takahiro Yamada,Keigo Ikeda,Hisao Makino,Tetsuya Yamamoto Surface & Coatings Technology,Vol.201,pp.4000-4003 2006
Induced absorption and spontaneous emission due to biexciton in two-dimensional semiconductor (CH3C6H4CH2NH3)2PbBr4 single crysta H. Makino,T. Goto,T. Yao,G. A. Mousdis,G. C. Papavassiliou J. Lumines,Vol.112,No.54-57 2005
Hybridization of Cr 3d-N 2p-Ga 4s in the wide band gap diluted magnetic semiconductor Ga1-xCrxN J. J. Kim,H. Makino,K. Kobayashi,Y. Takata,T. Yamamoto,T. Hanada,M. W. Cho,E. Ikenaga,M. Yabashi,D. Miwa,Y. Nishino,K. Tamasaku,T. Ishikawa,S. Shin,T. Yao Phys. Rev. B,Vol.70,pp.161315(R) 2004
Making ferromagnetic semiconductors out of III-V nitride semiconductors Hisao Makino,J. J. Kim,P. P. Chen,M. W. Cho,Takafumi Yao Proc. SPIE Int. Soc. Opt. Eng.,Vol.5774,pp.11 2004
Enhancement of Mn luminescence in ZnS:Mn multi-quantum-well structures N. Taghavinia,H. Makino,T. Yao Appl. Phys. Lett.,Vol.83,pp.4616 2003
Composition dependence of the energy gap of Zn1-x-yMgxBeySe quaternary alloys nearly lattice matched to GaAs K. Godo,H. Makino,M. W. Cho,J. H. Chang,Y. Yamazaki,T. Yao,M. Y. Shen,T. Goto Appl. Phys. Lett.,Vol.79,pp.4168-4170 2001
Raman investigation of Zn1-x-yMgxSe1-yTey quaternary alloys grown by molecular beam epitaxy H. Makino,H. Sasaki,J.H. Chang,T. Yao J. Cryst. Growth,Vol.214/215,pp.359-363 2000
Bandwidth control in a perovskite-type 3d1-correlated metal Ca1-xSrxVO3. II. Optical spectroscopy H. Makino,I. H. Inoue,M. J. Rozenberg,I. Hase,Y. Aiura,S. Onari Phys. Rev. B,Vol.58,pp.4384-4393 1998

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学会発表・講演など

  1. Laboratory hard X-ray photoemission spectroscopy of polycrystalline ZnO thin films,The 13th Korean Symposium on Surface Analysis(2018)

科学研究費

KAKENは国立情報学研究所が行っているサービスです。

区分 研究課題 研究種目 研究期間 課題番号
代表 多結晶酸化亜鉛薄膜における配向制御とアクセプタドーピングに関する研究 基盤研究(C) 2011 - 2013 23560026
分担 吸着酸素化学状態制御による高感度水素センサー 基盤研究(A) 2012/04/01 - 2015/03/31 24241025
代表 低温成膜酸化亜鉛多結晶薄膜の極性制御と格子欠陥 基盤研究(C) 2017/04/01 - 2020/03/31 (予定) 17K06356

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社会貢献及び広報活動

学外委員・学会活動など

  1. 一般社団法人 表面分析研究会 表面分析研究会 編集委員(2017~2018)
  2. 応用物理学会 中国四国支部役員幹事(2011~)
  3. 応用物理学会 中国四国支部 研究会企画委員(2009~)

その他の社会活動など

  1. 経済産業省・NEDO 「希少金属代替材料開発プロジェクト/透明電極向けI TO代替材料開発」サブリーダー(2007~)

主な著書など

  1. 酸化亜鉛の最先端技術と将来:第4章1.液晶ディスプレイ用透明導電膜,シーエムシー出版株式会社,2011,ISBN 978-4-7813-03